Design, fabrication and mechanical optimization of a flexural high speed nanopositioning imaging stage

Design, fabrication and mechanical optimization of a flexural high speed nanopositioning imaging stage

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009.

Bibliographic Details
Main Author: Panas, Robert M. (Robert Matthew)
Other Authors: Martin L. Culpepper.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2010
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/50558

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