Device design and process technology for sub-100 nm SOI MOSFET's

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 2001.

Bibliographic Details
Main Author:	Wei, Andy, 1972-
Other Authors:	Dimitri A. Antoniadis.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2010
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/51569

Internet

http://hdl.handle.net/1721.1/51569