Device design and process technology for sub-100 nm SOI MOSFET's
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 2001.
Main Author: | Wei, Andy, 1972- |
---|---|
Other Authors: | Dimitri A. Antoniadis. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2010
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/51569 |
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