The use of ionic liquid ion sources (ILIS) in FIB applications
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2009.
Main Author: | Zorzos, Anthony Nicholas |
---|---|
Other Authors: | Paulo Lozano. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2010
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/51647 |
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