The use of ionic liquid ion sources (ILIS) in FIB applications

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2009.

Bibliographic Details
Main Author: Zorzos, Anthony Nicholas
Other Authors: Paulo Lozano.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2010
Subjects:
Online Access:http://hdl.handle.net/1721.1/51647

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