Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor

SiGe based Focal Plane Arrays offer a low cost alternative for developing visible- NIR focal plane arrays that will cover the spectral band from 0.4 to 1.6 microns. The attractive features of SiGe based IRFPA's will take advantage of Silicon based technology, that promises small feature size, l...

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Main Authors: Sood, Ashok K., Richwine, Robert A., Puri, Yash R., DiLello, Nicole Ann, Hoyt, Judy L., Akinwande, Tayo I., Horn, Stuart, Balcerak, Raymond S., Venkatasubramanian, Rama, Bulman, Gary, D'Souza, Arvind I., Baramhall, Thomas G.
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Society of Photo-optical Instrumentation Engineers 2010
Online Access:http://hdl.handle.net/1721.1/52683
https://orcid.org/0000-0003-3001-9223
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author Sood, Ashok K.
Richwine, Robert A.
Puri, Yash R.
DiLello, Nicole Ann
Hoyt, Judy L.
Akinwande, Tayo I.
Horn, Stuart
Balcerak, Raymond S.
Venkatasubramanian, Rama
Bulman, Gary
D'Souza, Arvind I.
Baramhall, Thomas G.
author2 Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
author_facet Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Sood, Ashok K.
Richwine, Robert A.
Puri, Yash R.
DiLello, Nicole Ann
Hoyt, Judy L.
Akinwande, Tayo I.
Horn, Stuart
Balcerak, Raymond S.
Venkatasubramanian, Rama
Bulman, Gary
D'Souza, Arvind I.
Baramhall, Thomas G.
author_sort Sood, Ashok K.
collection MIT
description SiGe based Focal Plane Arrays offer a low cost alternative for developing visible- NIR focal plane arrays that will cover the spectral band from 0.4 to 1.6 microns. The attractive features of SiGe based IRFPA's will take advantage of Silicon based technology, that promises small feature size, low dark current and compatibility with the low power silicon CMOS circuits for signal processing. This paper discusses performance comparison for the SiGe based VIS-NIR Sensor with performance characteristics of InGaAs, InSb, and HgCdTe based IRFPA's. Various approaches including device designs are discussed for reducing the dark current in SiGe detector arrays; these include Superlattice, Quantum dot and Buried junction designs that have the potential of reducing the dark current by several orders of magnitude. The paper also discusses approaches to reduce the leakage current for small detector size and fabrication techniques. In addition several innovative approaches that have the potential of increasing the spectral response to 1.8 microns and beyond.
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spelling mit-1721.1/526832022-10-01T19:38:24Z Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor Sood, Ashok K. Richwine, Robert A. Puri, Yash R. DiLello, Nicole Ann Hoyt, Judy L. Akinwande, Tayo I. Horn, Stuart Balcerak, Raymond S. Venkatasubramanian, Rama Bulman, Gary D'Souza, Arvind I. Baramhall, Thomas G. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Microsystems Technology Laboratories Hoyt, Judy L. DiLello, Nicole Ann Hoyt, Judy L. Akinwande, Tayo I. SiGe based Focal Plane Arrays offer a low cost alternative for developing visible- NIR focal plane arrays that will cover the spectral band from 0.4 to 1.6 microns. The attractive features of SiGe based IRFPA's will take advantage of Silicon based technology, that promises small feature size, low dark current and compatibility with the low power silicon CMOS circuits for signal processing. This paper discusses performance comparison for the SiGe based VIS-NIR Sensor with performance characteristics of InGaAs, InSb, and HgCdTe based IRFPA's. Various approaches including device designs are discussed for reducing the dark current in SiGe detector arrays; these include Superlattice, Quantum dot and Buried junction designs that have the potential of reducing the dark current by several orders of magnitude. The paper also discusses approaches to reduce the leakage current for small detector size and fabrication techniques. In addition several innovative approaches that have the potential of increasing the spectral response to 1.8 microns and beyond. 2010-03-17T19:12:46Z 2010-03-17T19:12:46Z 2009-05 2009-04 Article http://purl.org/eprint/type/JournalArticle 0277-786X SPIE CID: 72983D-11 http://hdl.handle.net/1721.1/52683 Sood, Ashok K. et al. “Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor.” Infrared Technology and Applications XXXV. Ed. Bjorn F. Andresen, Gabor F. Fulop, & Paul R. Norton. Orlando, FL, USA: SPIE, 2009. 72983D-11. © 2009 SPIE https://orcid.org/0000-0003-3001-9223 en_US http://dx.doi.org/10.1117/12.820896 Proceedings of SPIE--the International Society for Optical Engineering Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Society of Photo-optical Instrumentation Engineers SPIE
spellingShingle Sood, Ashok K.
Richwine, Robert A.
Puri, Yash R.
DiLello, Nicole Ann
Hoyt, Judy L.
Akinwande, Tayo I.
Horn, Stuart
Balcerak, Raymond S.
Venkatasubramanian, Rama
Bulman, Gary
D'Souza, Arvind I.
Baramhall, Thomas G.
Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor
title Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor
title_full Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor
title_fullStr Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor
title_full_unstemmed Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor
title_short Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor
title_sort development of low dark current sige detector arrays for visible nir imaging sensor
url http://hdl.handle.net/1721.1/52683
https://orcid.org/0000-0003-3001-9223
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