Design of a precise X-Y-Theta nanopositioning optical sensor
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2010
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| Online Access: | http://hdl.handle.net/1721.1/54494 |
| _version_ | 1826211485972430848 |
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| author | Johnson, Michael B. (Michael Barnet) |
| author2 | Brian W. Anthony. |
| author_facet | Brian W. Anthony. Johnson, Michael B. (Michael Barnet) |
| author_sort | Johnson, Michael B. (Michael Barnet) |
| collection | MIT |
| description | Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009. |
| first_indexed | 2024-09-23T15:06:42Z |
| format | Thesis |
| id | mit-1721.1/54494 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T15:06:42Z |
| publishDate | 2010 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/544942019-04-10T15:21:30Z Design of a precise X-Y-Theta nanopositioning optical sensor Johnson, Michael B. (Michael Barnet) Brian W. Anthony. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Mechanical Engineering. Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009. Cataloged from PDF version of thesis. Includes bibliographical references (p. 55-56). A position measurement system was designed to estimate the absolute and relative position of an x-y-[theta] nanopositioning stage for use in the metrology of microfluidic devices during and after manufacturing. The position sensing system consists of a visible-light high-speed area camera, a target pattern, and image processing software. The target pattern consists of a square grid with unique binary codes in each square that identify the square's global position in the grid. In macroscopic-scale testing of the position sensing system, the angular orientation of the target pattern was successfully measured with less than one degree uncertainty. However this uncertainty is several orders of magnitude larger than the target precision of the sensor, and it is still unclear whether sufficient precision is attainable with this system and software. This thesis also describes a previous attempt to perform this metrology using consumer-grade contact image sensor scanners, other elements of the current metrology system design, and the non-orthogonal viewing angle concept, which is the fundamental underpinning of the microfluidic metrology system as a whole. by Michael B. Johnson. S.B. 2010-04-28T15:42:06Z 2010-04-28T15:42:06Z 2009 2009 Thesis http://hdl.handle.net/1721.1/54494 558623924 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 56 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering. Johnson, Michael B. (Michael Barnet) Design of a precise X-Y-Theta nanopositioning optical sensor |
| title | Design of a precise X-Y-Theta nanopositioning optical sensor |
| title_full | Design of a precise X-Y-Theta nanopositioning optical sensor |
| title_fullStr | Design of a precise X-Y-Theta nanopositioning optical sensor |
| title_full_unstemmed | Design of a precise X-Y-Theta nanopositioning optical sensor |
| title_short | Design of a precise X-Y-Theta nanopositioning optical sensor |
| title_sort | design of a precise x y theta nanopositioning optical sensor |
| topic | Mechanical Engineering. |
| url | http://hdl.handle.net/1721.1/54494 |
| work_keys_str_mv | AT johnsonmichaelbmichaelbarnet designofaprecisexythetananopositioningopticalsensor |