Design of a precise X-Y-Theta nanopositioning optical sensor

Design of a precise X-Y-Theta nanopositioning optical sensor

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009.

Bibliographic Details
Main Author: Johnson, Michael B. (Michael Barnet)
Other Authors: Brian W. Anthony.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2010
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/54494

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