Electron Materials Analysis by Auger Electron Microscope (AEM)

Electron Materials Analysis by Auger Electron Microscope (AEM)

Contains research objectives and summary of research on one research project.

Bibliographic Details
Main Authors: Coleman, John W., Graham, Michael R.
Format: Technical Report
Language:English
Published: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:
Electron Materials Analysis by Auger Electron Microscope (AEM)
Ultrahigh-Sensitivity Electron Optical Determination of Impurity Species in Si
Ultrahigh-Sensitivity Electron Optical Location of Impurity Species in Si
Ultrahigh-Sensitivity Electron Optical Determination of Impurity Species in GaAs
Ultrahigh-Sensitivity Electron Optical Location of Impurity Species in GaAs
Ultrahigh-Sensitivity Electron Optical Determination of Impurity Species in Other Binary Compound Semiconductors
Ultrahigh-Sensitivity Electron Optical Location of Impurity Species Other in Binary Compound Semiconductors
Ultrahigh-Sensitivity Electron Optical Determination of Impurity Species in Other Ternary Compound Semiconductors
Ultrahigh-Sensitivity Electron Optical Location of Impurity Species in Other Ternary Compound Semiconductors
Ultrahigh-Sensitivity Electron Optical Determination of Impurity Species in Other Quarternary Compound Semiconductors
Ultrahigh-Sensitivity Electron Optical Location of Impurity Species in Other Quarternary Compound Semiconductors
Online Access:http://hdl.handle.net/1721.1/56660

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