Microstructure Fabrication
Contains reports on seven research projects.
| Main Authors: | , , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
| Published: |
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/56755 |
| _version_ | 1811076337657446400 |
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| author | Smith, Henry I. Melngailis, John Dana, Stephane S. Hawryluk, Andrew M. Kwasnick, Robert F. Bezdjian, Krikor A. Flanders, Dale C. Kappes, Manfred M. Staley, Ralph H. Kastner, Marc A. Griswold, Marsden P. Litster, James David Von Känel, Hans |
| author_facet | Smith, Henry I. Melngailis, John Dana, Stephane S. Hawryluk, Andrew M. Kwasnick, Robert F. Bezdjian, Krikor A. Flanders, Dale C. Kappes, Manfred M. Staley, Ralph H. Kastner, Marc A. Griswold, Marsden P. Litster, James David Von Känel, Hans |
| author_sort | Smith, Henry I. |
| collection | MIT |
| description | Contains reports on seven research projects. |
| first_indexed | 2024-09-23T10:19:47Z |
| format | Technical Report |
| id | mit-1721.1/56755 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T10:19:47Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/567552019-04-12T23:53:35Z Microstructure Fabrication Smith, Henry I. Melngailis, John Dana, Stephane S. Hawryluk, Andrew M. Kwasnick, Robert F. Bezdjian, Krikor A. Flanders, Dale C. Kappes, Manfred M. Staley, Ralph H. Kastner, Marc A. Griswold, Marsden P. Litster, James David Von Känel, Hans Microstructure Fabrication Creation of the Submicrometer Structures Laboratory Development of Microstructure Fabrication Techniques Graphoepitaxy Attachment and Properties of Molecules on Submicrometer Structures Electronic Transport in Quasi-One-Dimensional Submicrometer Structures in Silicon Inversion Layers X-Ray Lenses Diffraction Gratings Submicrometer Structures Liquid-Crystal Research Contains reports on seven research projects. National Science Foundation (Grant ENG78-10436) M.I.T. Sloan Fund for Basic Research Joint Services Electronics Program (Contract DAAG29-78-C-0020) U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) M.I.T. Cabot Fund Lawrence Livermore Laboratory (Subcontract 206-92-09) National Science Foundation (Grant DMR78-23555) 2010-07-15T21:01:23Z 2010-07-15T21:01:23Z 1980-01 Technical Report RLE_PR_122_XIX http://hdl.handle.net/1721.1/56755 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1980 General Physics Microstructure Fabrication Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 122 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Microstructure Fabrication Creation of the Submicrometer Structures Laboratory Development of Microstructure Fabrication Techniques Graphoepitaxy Attachment and Properties of Molecules on Submicrometer Structures Electronic Transport in Quasi-One-Dimensional Submicrometer Structures in Silicon Inversion Layers X-Ray Lenses Diffraction Gratings Submicrometer Structures Liquid-Crystal Research Smith, Henry I. Melngailis, John Dana, Stephane S. Hawryluk, Andrew M. Kwasnick, Robert F. Bezdjian, Krikor A. Flanders, Dale C. Kappes, Manfred M. Staley, Ralph H. Kastner, Marc A. Griswold, Marsden P. Litster, James David Von Känel, Hans Microstructure Fabrication |
| title | Microstructure Fabrication |
| title_full | Microstructure Fabrication |
| title_fullStr | Microstructure Fabrication |
| title_full_unstemmed | Microstructure Fabrication |
| title_short | Microstructure Fabrication |
| title_sort | microstructure fabrication |
| topic | Microstructure Fabrication Creation of the Submicrometer Structures Laboratory Development of Microstructure Fabrication Techniques Graphoepitaxy Attachment and Properties of Molecules on Submicrometer Structures Electronic Transport in Quasi-One-Dimensional Submicrometer Structures in Silicon Inversion Layers X-Ray Lenses Diffraction Gratings Submicrometer Structures Liquid-Crystal Research |
| url | http://hdl.handle.net/1721.1/56755 |
| work_keys_str_mv | AT smithhenryi microstructurefabrication AT melngailisjohn microstructurefabrication AT danastephanes microstructurefabrication AT hawrylukandrewm microstructurefabrication AT kwasnickrobertf microstructurefabrication AT bezdjiankrikora microstructurefabrication AT flandersdalec microstructurefabrication AT kappesmanfredm microstructurefabrication AT staleyralphh microstructurefabrication AT kastnermarca microstructurefabrication AT griswoldmarsdenp microstructurefabrication AT litsterjamesdavid microstructurefabrication AT vonkanelhans microstructurefabrication |