Submicron Structures Fabrication and Research
Contains reports on twelve research projects.
| Main Authors: | , , , , , , , , , , , , , , , , , , , , , |
|---|---|
| Format: | Technical Report |
| Language: | English |
| Published: |
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/56844 |
| _version_ | 1826206511822536704 |
|---|---|
| author | Smith, Henry I. Hawryluk, Andrew M. Melngailis, John J. Schatterbug, Mark L. Ceglio, Natale M., Jr. Price, R. H. Tsumita, Norikazu Anderson, Erik H. Horwitz, Christopher M. Dana, Stephane S. Atwater, Harry A. Bezjian, Krikor Keavney, Christopher J. Fonstad, Clifton G. Markunas, Robert J. Haus, Hermann A. Islam, Muhammed N. Garber, Edward M. Warren, Alan C. Antoniadis, Dimitri A. Kwasnick, Robert F. Kastner, Marc A. |
| author_facet | Smith, Henry I. Hawryluk, Andrew M. Melngailis, John J. Schatterbug, Mark L. Ceglio, Natale M., Jr. Price, R. H. Tsumita, Norikazu Anderson, Erik H. Horwitz, Christopher M. Dana, Stephane S. Atwater, Harry A. Bezjian, Krikor Keavney, Christopher J. Fonstad, Clifton G. Markunas, Robert J. Haus, Hermann A. Islam, Muhammed N. Garber, Edward M. Warren, Alan C. Antoniadis, Dimitri A. Kwasnick, Robert F. Kastner, Marc A. |
| author_sort | Smith, Henry I. |
| collection | MIT |
| description | Contains reports on twelve research projects. |
| first_indexed | 2024-09-23T13:33:23Z |
| format | Technical Report |
| id | mit-1721.1/56844 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T13:33:23Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/568442019-04-11T10:12:54Z Submicron Structures Fabrication and Research Smith, Henry I. Hawryluk, Andrew M. Melngailis, John J. Schatterbug, Mark L. Ceglio, Natale M., Jr. Price, R. H. Tsumita, Norikazu Anderson, Erik H. Horwitz, Christopher M. Dana, Stephane S. Atwater, Harry A. Bezjian, Krikor Keavney, Christopher J. Fonstad, Clifton G. Markunas, Robert J. Haus, Hermann A. Islam, Muhammed N. Garber, Edward M. Warren, Alan C. Antoniadis, Dimitri A. Kwasnick, Robert F. Kastner, Marc A. Submicron Structures Fabrication and Research Submicron-Period Gold Transmission Gratings for Soft X-ray Spectroscopy Spatial-Period-Division Fabrication of X-ray Masks Using Anisotropic Etching of (110) SI and Shadowing Techniques Reactive Sputter Etching of Si, SiO₂, Cr, and Al with Gas Mixtures Based on CF₄, Cl₂, and SiCl₄ Graphoepitaxy by CVD Solution Growth Graphoepitaxy for Solar Cells Liquid Phase Epitaxy of InP Filters Based on the Coupling of Surface Acoustic Waves in Gratings to Bulk Plate Modes Fabrication of Corrugated-Gate MOS Structures Narrow Inversion Layers in Silicon Collaborative Projects Contains reports on twelve research projects. Lawrence Livermore Laboratory (Subcontract 2069209) Joint Services Electronics Program (Contract DAAG29-C-0104) U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) Joint Services Electronics Program (Contract DAAG29-80-C-0104) Harkness Foundation I.B.M. U.S. Department of Energy (Contract DE-ACO2-80-E10179) National Science Foundation (Grant ECS80-17705) 2010-07-15T21:29:41Z 2010-07-15T21:29:41Z 1982-01 Technical Report RLE_PR_124_17 http://hdl.handle.net/1721.1/56844 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1982 Submicron Structures Fabrication and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 124 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Submicron Structures Fabrication and Research Submicron-Period Gold Transmission Gratings for Soft X-ray Spectroscopy Spatial-Period-Division Fabrication of X-ray Masks Using Anisotropic Etching of (110) SI and Shadowing Techniques Reactive Sputter Etching of Si, SiO₂, Cr, and Al with Gas Mixtures Based on CF₄, Cl₂, and SiCl₄ Graphoepitaxy by CVD Solution Growth Graphoepitaxy for Solar Cells Liquid Phase Epitaxy of InP Filters Based on the Coupling of Surface Acoustic Waves in Gratings to Bulk Plate Modes Fabrication of Corrugated-Gate MOS Structures Narrow Inversion Layers in Silicon Collaborative Projects Smith, Henry I. Hawryluk, Andrew M. Melngailis, John J. Schatterbug, Mark L. Ceglio, Natale M., Jr. Price, R. H. Tsumita, Norikazu Anderson, Erik H. Horwitz, Christopher M. Dana, Stephane S. Atwater, Harry A. Bezjian, Krikor Keavney, Christopher J. Fonstad, Clifton G. Markunas, Robert J. Haus, Hermann A. Islam, Muhammed N. Garber, Edward M. Warren, Alan C. Antoniadis, Dimitri A. Kwasnick, Robert F. Kastner, Marc A. Submicron Structures Fabrication and Research |
| title | Submicron Structures Fabrication and Research |
| title_full | Submicron Structures Fabrication and Research |
| title_fullStr | Submicron Structures Fabrication and Research |
| title_full_unstemmed | Submicron Structures Fabrication and Research |
| title_short | Submicron Structures Fabrication and Research |
| title_sort | submicron structures fabrication and research |
| topic | Submicron Structures Fabrication and Research Submicron-Period Gold Transmission Gratings for Soft X-ray Spectroscopy Spatial-Period-Division Fabrication of X-ray Masks Using Anisotropic Etching of (110) SI and Shadowing Techniques Reactive Sputter Etching of Si, SiO₂, Cr, and Al with Gas Mixtures Based on CF₄, Cl₂, and SiCl₄ Graphoepitaxy by CVD Solution Growth Graphoepitaxy for Solar Cells Liquid Phase Epitaxy of InP Filters Based on the Coupling of Surface Acoustic Waves in Gratings to Bulk Plate Modes Fabrication of Corrugated-Gate MOS Structures Narrow Inversion Layers in Silicon Collaborative Projects |
| url | http://hdl.handle.net/1721.1/56844 |
| work_keys_str_mv | AT smithhenryi submicronstructuresfabricationandresearch AT hawrylukandrewm submicronstructuresfabricationandresearch AT melngailisjohnj submicronstructuresfabricationandresearch AT schatterbugmarkl submicronstructuresfabricationandresearch AT ceglionatalemjr submicronstructuresfabricationandresearch AT pricerh submicronstructuresfabricationandresearch AT tsumitanorikazu submicronstructuresfabricationandresearch AT andersonerikh submicronstructuresfabricationandresearch AT horwitzchristopherm submicronstructuresfabricationandresearch AT danastephanes submicronstructuresfabricationandresearch AT atwaterharrya submicronstructuresfabricationandresearch AT bezjiankrikor submicronstructuresfabricationandresearch AT keavneychristopherj submicronstructuresfabricationandresearch AT fonstadcliftong submicronstructuresfabricationandresearch AT markunasrobertj submicronstructuresfabricationandresearch AT haushermanna submicronstructuresfabricationandresearch AT islammuhammedn submicronstructuresfabricationandresearch AT garberedwardm submicronstructuresfabricationandresearch AT warrenalanc submicronstructuresfabricationandresearch AT antoniadisdimitria submicronstructuresfabricationandresearch AT kwasnickrobertf submicronstructuresfabricationandresearch AT kastnermarca submicronstructuresfabricationandresearch |