Submicron Structures Fabrication and Research

Submicron Structures Fabrication and Research

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Contains reports on twelve research projects.

Bibliographic Details
Main Authors: Smith, Henry I., Hawryluk, Andrew M., Melngailis, John J., Schatterbug, Mark L., Ceglio, Natale M., Jr., Price, R. H., Tsumita, Norikazu, Anderson, Erik H., Horwitz, Christopher M., Dana, Stephane S., Atwater, Harry A., Bezjian, Krikor, Keavney, Christopher J., Fonstad, Clifton G., Markunas, Robert J., Haus, Hermann A., Islam, Muhammed N., Garber, Edward M., Warren, Alan C., Antoniadis, Dimitri A., Kwasnick, Robert F., Kastner, Marc A.
Format: Technical Report
Language:English
Published: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:
Submicron Structures Fabrication and Research
Submicron-Period Gold Transmission Gratings for Soft X-ray Spectroscopy
Spatial-Period-Division
Fabrication of X-ray Masks Using Anisotropic Etching of (110) SI and Shadowing Techniques
Reactive Sputter Etching of Si, SiO₂, Cr, and Al with Gas Mixtures Based on CF₄, Cl₂, and SiCl₄
Graphoepitaxy by CVD
Solution Growth
Graphoepitaxy for Solar Cells
Liquid Phase Epitaxy of InP
Filters Based on the Coupling of Surface Acoustic Waves in Gratings to Bulk Plate Modes
Fabrication of Corrugated-Gate MOS Structures
Narrow Inversion Layers in Silicon
Collaborative Projects
Online Access:http://hdl.handle.net/1721.1/56844

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