Submicron Structures Technology and Research
Contains reports on thirteen research projects.
| Main Authors: | , , , , , , , , , , , , , , , , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
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Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/56894 |
| _version_ | 1826196689873010688 |
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| author | Anderson, Erik H. Hawryluk, Andrew M. Plotnik, Irving Smith, Henry I. Lezec, Henri J. Melngailis, John Kwasnick, Robert F. Licini, Jerome C. Kastner, Marc A. Lee, Patrick A. Warren, Alan C. Antoniadis, Dimitri A. Chou, Stephen Y. Thompson, Carl V. Yonehara, Takao Wong, Chee C. Atwater, Harry A. Schattenburg, Mark L. Ceglio, Natale M., Jr. Canizares, Claude R. Stein, Josephine A. Summa, Deborah A. Rajchman, Jan A. Paynter, Henry M. Chen, Dong-Pei Islam, Mohammed Haus, Hermann A. |
| author_facet | Anderson, Erik H. Hawryluk, Andrew M. Plotnik, Irving Smith, Henry I. Lezec, Henri J. Melngailis, John Kwasnick, Robert F. Licini, Jerome C. Kastner, Marc A. Lee, Patrick A. Warren, Alan C. Antoniadis, Dimitri A. Chou, Stephen Y. Thompson, Carl V. Yonehara, Takao Wong, Chee C. Atwater, Harry A. Schattenburg, Mark L. Ceglio, Natale M., Jr. Canizares, Claude R. Stein, Josephine A. Summa, Deborah A. Rajchman, Jan A. Paynter, Henry M. Chen, Dong-Pei Islam, Mohammed Haus, Hermann A. |
| author_sort | Anderson, Erik H. |
| collection | MIT |
| description | Contains reports on thirteen research projects. |
| first_indexed | 2024-09-23T10:34:56Z |
| format | Technical Report |
| id | mit-1721.1/56894 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T10:34:56Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/568942019-04-11T10:17:22Z Submicron Structures Technology and Research Anderson, Erik H. Hawryluk, Andrew M. Plotnik, Irving Smith, Henry I. Lezec, Henri J. Melngailis, John Kwasnick, Robert F. Licini, Jerome C. Kastner, Marc A. Lee, Patrick A. Warren, Alan C. Antoniadis, Dimitri A. Chou, Stephen Y. Thompson, Carl V. Yonehara, Takao Wong, Chee C. Atwater, Harry A. Schattenburg, Mark L. Ceglio, Natale M., Jr. Canizares, Claude R. Stein, Josephine A. Summa, Deborah A. Rajchman, Jan A. Paynter, Henry M. Chen, Dong-Pei Islam, Mohammed Haus, Hermann A. Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Electronic Conduction in Ultra-Narrow Silicon Inversion Layers Corrugated Gate MOS Structures Submicron FET's in Si Graphoepitaxy of Si Graphoepitaxy of Ge Graphoepitaxy of Model Materials Zone-Melting Recrystallization of Si for Solar Cells Zone-Melting Recrystallization of IIl-V Materials Submicrometer-Period Gold Transmission Gratings Zone Plates for X-Ray Spectroscopy and Microscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Switchable Zero-Order Diffraction Gratings as Light Valves Surface Acoustic Wave Propagation in Gratings Collaborative Projects Contains reports on thirteen research projects. Joint Services Electronics Program (Contract DAAG29-83-K-0003) U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) National Science Foundation (Contract ECS82-05701) U.S. Department of Energy (Contract DE-ACO2-82-ER-13019) Lawrence Livermore Laboratory (Contract 2069209) National Aeronautics and Space Administration (Contract NGL-22-009-638) U.S. Navy - Office of Naval Research (Contract N00014-84-K-0073) National Science Foundation (Grant ECS80-17705) National Science Foundation (Grant ENG79-09980) 2010-07-15T21:48:19Z 2010-07-15T21:48:19Z 1984-01 Technical Report RLE_PR_126_17 http://hdl.handle.net/1721.1/56894 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1984 Submicron Structures Technology and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 126 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Electronic Conduction in Ultra-Narrow Silicon Inversion Layers Corrugated Gate MOS Structures Submicron FET's in Si Graphoepitaxy of Si Graphoepitaxy of Ge Graphoepitaxy of Model Materials Zone-Melting Recrystallization of Si for Solar Cells Zone-Melting Recrystallization of IIl-V Materials Submicrometer-Period Gold Transmission Gratings Zone Plates for X-Ray Spectroscopy and Microscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Switchable Zero-Order Diffraction Gratings as Light Valves Surface Acoustic Wave Propagation in Gratings Collaborative Projects Anderson, Erik H. Hawryluk, Andrew M. Plotnik, Irving Smith, Henry I. Lezec, Henri J. Melngailis, John Kwasnick, Robert F. Licini, Jerome C. Kastner, Marc A. Lee, Patrick A. Warren, Alan C. Antoniadis, Dimitri A. Chou, Stephen Y. Thompson, Carl V. Yonehara, Takao Wong, Chee C. Atwater, Harry A. Schattenburg, Mark L. Ceglio, Natale M., Jr. Canizares, Claude R. Stein, Josephine A. Summa, Deborah A. Rajchman, Jan A. Paynter, Henry M. Chen, Dong-Pei Islam, Mohammed Haus, Hermann A. Submicron Structures Technology and Research |
| title | Submicron Structures Technology and Research |
| title_full | Submicron Structures Technology and Research |
| title_fullStr | Submicron Structures Technology and Research |
| title_full_unstemmed | Submicron Structures Technology and Research |
| title_short | Submicron Structures Technology and Research |
| title_sort | submicron structures technology and research |
| topic | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Electronic Conduction in Ultra-Narrow Silicon Inversion Layers Corrugated Gate MOS Structures Submicron FET's in Si Graphoepitaxy of Si Graphoepitaxy of Ge Graphoepitaxy of Model Materials Zone-Melting Recrystallization of Si for Solar Cells Zone-Melting Recrystallization of IIl-V Materials Submicrometer-Period Gold Transmission Gratings Zone Plates for X-Ray Spectroscopy and Microscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Switchable Zero-Order Diffraction Gratings as Light Valves Surface Acoustic Wave Propagation in Gratings Collaborative Projects |
| url | http://hdl.handle.net/1721.1/56894 |
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