Submicron Structures Technology and Research

Contains reports on fourteen research projects.

Bibliographic Details
Main Authors:	Anderson, Erik H., Plotnik, Irving, Schattenburg, Mark L., Melngailis, John, Smith, Henry I., Kwasnick, Robert F., Licini, Jerome C., Kastner, Marc A., Lee, Patrick A., Warren, Alan C., Antoniadis, Dimitri A., Chou, Stephen Y., Shahidi, Ghavam G., Ippen, Erich P., Palmer, Joyce E., Wong, Chee C., Yonehara, Takao, Garrison, Stephen M., Atwater, Harry A., Thompson, Carl V., Schott, Stephen C., Canizares, Claude R., Stein, Josephine A., Summa, Deborah A., Rajchman, Jan A., Paynter, Henry M., Chen, Dong-Pei, Haus, Hermann A.
Format:	Technical Report
Language:	English
Published:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:	Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Electronic Conduction in Ultra-Narrow Silicon Inversion Layers Corrugated Gate MOS Structures Submicron FET's in Si Submicron-Gap High-Mobility Silicon Picosecond Photodetectors Graphoepitaxy of Si Graphoepitaxy of Ge Graphoepitaxy of Model Materials Zone-Melting Recrystallization of Si for Solar Cells Integration of Si and Ill-V Materials Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Display Based on Switchable Zero Order Diffraction Grating Light Valves Surface Acoustic Wave Propagation in Gratings Near IR Grating Polarizers
Online Access:	http://hdl.handle.net/1721.1/56933

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author	Anderson, Erik H. Plotnik, Irving Schattenburg, Mark L. Melngailis, John Smith, Henry I. Kwasnick, Robert F. Licini, Jerome C. Kastner, Marc A. Lee, Patrick A. Warren, Alan C. Antoniadis, Dimitri A. Chou, Stephen Y. Shahidi, Ghavam G. Ippen, Erich P. Palmer, Joyce E. Wong, Chee C. Yonehara, Takao Garrison, Stephen M. Atwater, Harry A. Thompson, Carl V. Schott, Stephen C. Canizares, Claude R. Stein, Josephine A. Summa, Deborah A. Rajchman, Jan A. Paynter, Henry M. Chen, Dong-Pei Haus, Hermann A.
author_facet	Anderson, Erik H. Plotnik, Irving Schattenburg, Mark L. Melngailis, John Smith, Henry I. Kwasnick, Robert F. Licini, Jerome C. Kastner, Marc A. Lee, Patrick A. Warren, Alan C. Antoniadis, Dimitri A. Chou, Stephen Y. Shahidi, Ghavam G. Ippen, Erich P. Palmer, Joyce E. Wong, Chee C. Yonehara, Takao Garrison, Stephen M. Atwater, Harry A. Thompson, Carl V. Schott, Stephen C. Canizares, Claude R. Stein, Josephine A. Summa, Deborah A. Rajchman, Jan A. Paynter, Henry M. Chen, Dong-Pei Haus, Hermann A.
author_sort	Anderson, Erik H.
collection	MIT
description	Contains reports on fourteen research projects.
first_indexed	2024-09-23T10:41:16Z
format	Technical Report
id	mit-1721.1/56933
institution	Massachusetts Institute of Technology
language	English
last_indexed	2024-09-23T10:41:16Z
publishDate	2010
publisher	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
record_format	dspace
spelling	mit-1721.1/569332019-04-10T09:26:57Z Submicron Structures Technology and Research Anderson, Erik H. Plotnik, Irving Schattenburg, Mark L. Melngailis, John Smith, Henry I. Kwasnick, Robert F. Licini, Jerome C. Kastner, Marc A. Lee, Patrick A. Warren, Alan C. Antoniadis, Dimitri A. Chou, Stephen Y. Shahidi, Ghavam G. Ippen, Erich P. Palmer, Joyce E. Wong, Chee C. Yonehara, Takao Garrison, Stephen M. Atwater, Harry A. Thompson, Carl V. Schott, Stephen C. Canizares, Claude R. Stein, Josephine A. Summa, Deborah A. Rajchman, Jan A. Paynter, Henry M. Chen, Dong-Pei Haus, Hermann A. Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Electronic Conduction in Ultra-Narrow Silicon Inversion Layers Corrugated Gate MOS Structures Submicron FET's in Si Submicron-Gap High-Mobility Silicon Picosecond Photodetectors Graphoepitaxy of Si Graphoepitaxy of Ge Graphoepitaxy of Model Materials Zone-Melting Recrystallization of Si for Solar Cells Integration of Si and Ill-V Materials Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Display Based on Switchable Zero Order Diffraction Grating Light Valves Surface Acoustic Wave Propagation in Gratings Near IR Grating Polarizers Contains reports on fourteen research projects. Joint Services Electronics Program (Contract DAAG29-83-K-0003) U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) National Science Foundation (Grant ECS82-05701) Semiconductor Research Corporation (Grant 83-01-033) U.S. Department of Energy (Contract DE-ACO2-82-ER-13019) Lawrence Livermore National Laboratory (Contract 2069209) National Aeronautics and Space Administration (Contract NAS5-27591) Defense Advanced Research Projects Agency (Contract N00014-79-C-0908) National Science Foundation (Grant ECS80-17705) National Aeronautics and Space Administration (Contract NGL22-009-638) 2010-07-15T21:57:09Z 2010-07-15T21:57:09Z 1985-01 Technical Report RLE_PR_127_01 http://hdl.handle.net/1721.1/56933 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985 Submicron Structures Technology and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
spellingShingle	Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Electronic Conduction in Ultra-Narrow Silicon Inversion Layers Corrugated Gate MOS Structures Submicron FET's in Si Submicron-Gap High-Mobility Silicon Picosecond Photodetectors Graphoepitaxy of Si Graphoepitaxy of Ge Graphoepitaxy of Model Materials Zone-Melting Recrystallization of Si for Solar Cells Integration of Si and Ill-V Materials Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Display Based on Switchable Zero Order Diffraction Grating Light Valves Surface Acoustic Wave Propagation in Gratings Near IR Grating Polarizers Anderson, Erik H. Plotnik, Irving Schattenburg, Mark L. Melngailis, John Smith, Henry I. Kwasnick, Robert F. Licini, Jerome C. Kastner, Marc A. Lee, Patrick A. Warren, Alan C. Antoniadis, Dimitri A. Chou, Stephen Y. Shahidi, Ghavam G. Ippen, Erich P. Palmer, Joyce E. Wong, Chee C. Yonehara, Takao Garrison, Stephen M. Atwater, Harry A. Thompson, Carl V. Schott, Stephen C. Canizares, Claude R. Stein, Josephine A. Summa, Deborah A. Rajchman, Jan A. Paynter, Henry M. Chen, Dong-Pei Haus, Hermann A. Submicron Structures Technology and Research
title	Submicron Structures Technology and Research
title_full	Submicron Structures Technology and Research
title_fullStr	Submicron Structures Technology and Research
title_full_unstemmed	Submicron Structures Technology and Research
title_short	Submicron Structures Technology and Research
title_sort	submicron structures technology and research
topic	Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Electronic Conduction in Ultra-Narrow Silicon Inversion Layers Corrugated Gate MOS Structures Submicron FET's in Si Submicron-Gap High-Mobility Silicon Picosecond Photodetectors Graphoepitaxy of Si Graphoepitaxy of Ge Graphoepitaxy of Model Materials Zone-Melting Recrystallization of Si for Solar Cells Integration of Si and Ill-V Materials Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Display Based on Switchable Zero Order Diffraction Grating Light Valves Surface Acoustic Wave Propagation in Gratings Near IR Grating Polarizers
url	http://hdl.handle.net/1721.1/56933
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Submicron Structures Technology and Research

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