Submicron Structures Technology and Research

Submicron Structures Technology and Research

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Contains reports on fourteen research projects.

Bibliographic Details
Main Authors: Anderson, Erik H., Plotnik, Irving, Schattenburg, Mark L., Melngailis, John, Smith, Henry I., Kwasnick, Robert F., Licini, Jerome C., Kastner, Marc A., Lee, Patrick A., Warren, Alan C., Antoniadis, Dimitri A., Chou, Stephen Y., Shahidi, Ghavam G., Ippen, Erich P., Palmer, Joyce E., Wong, Chee C., Yonehara, Takao, Garrison, Stephen M., Atwater, Harry A., Thompson, Carl V., Schott, Stephen C., Canizares, Claude R., Stein, Josephine A., Summa, Deborah A., Rajchman, Jan A., Paynter, Henry M., Chen, Dong-Pei, Haus, Hermann A.
Format: Technical Report
Language:English
Published: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:
Submicron Structures Technology
Submicron Structures Research
Submicron Structures Laboratory
Microfabrication at Linewidths of 0.1 μm and Below
Electronic Conduction in Ultra-Narrow Silicon Inversion Layers
Corrugated Gate MOS Structures
Submicron FET's in Si
Submicron-Gap High-Mobility Silicon Picosecond Photodetectors
Graphoepitaxy of Si
Graphoepitaxy of Ge
Graphoepitaxy of Model Materials
Zone-Melting Recrystallization of Si for Solar Cells
Integration of Si and Ill-V Materials
Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy
High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy
Display Based on Switchable Zero Order Diffraction Grating Light Valves
Surface Acoustic Wave Propagation in Gratings
Near IR Grating Polarizers
Online Access:http://hdl.handle.net/1721.1/56933

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