Focused Ion Beam Fabrication
Contains reports on three research projects.
| Principais autores: | , , , , , , , |
|---|---|
| Formato: | Technical Report |
| Idioma: | English |
| Publicado em: |
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
|
| Assuntos: | |
| Acesso em linha: | http://hdl.handle.net/1721.1/56945 |
| _version_ | 1826191637576941568 |
|---|---|
| author | Melngailis, John Musil, Christian R. Stevens, Eugene H. Utlaut, Mark Geis, Michael W. Mountain, Robert W. Lezec, Henri J. Kellog, Edwin |
| author_facet | Melngailis, John Musil, Christian R. Stevens, Eugene H. Utlaut, Mark Geis, Michael W. Mountain, Robert W. Lezec, Henri J. Kellog, Edwin |
| author_sort | Melngailis, John |
| collection | MIT |
| description | Contains reports on three research projects. |
| first_indexed | 2024-09-23T08:59:02Z |
| format | Technical Report |
| id | mit-1721.1/56945 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T08:59:02Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/569452019-04-10T20:03:49Z Focused Ion Beam Fabrication Melngailis, John Musil, Christian R. Stevens, Eugene H. Utlaut, Mark Geis, Michael W. Mountain, Robert W. Lezec, Henri J. Kellog, Edwin Focused Ion Beam Fabrication Focused Ion Beam System Connections Through Focused Ion Beam Milled Vias Mask Repair Ion Assisted Deposition Contains reports on three research projects. Joint Services Electronics Program (Contract DAAG29-83-K-0003) Charles Stark Draper Laboratory (Contract DL-H-225270) International Business Machines, Inc. (Contract 3260) 2010-07-15T21:58:50Z 2010-07-15T21:58:50Z 1985-01 Technical Report RLE_PR_127_03 http://hdl.handle.net/1721.1/56945 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985 Focused Ion Beam Fabrication Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Focused Ion Beam Fabrication Focused Ion Beam System Connections Through Focused Ion Beam Milled Vias Mask Repair Ion Assisted Deposition Melngailis, John Musil, Christian R. Stevens, Eugene H. Utlaut, Mark Geis, Michael W. Mountain, Robert W. Lezec, Henri J. Kellog, Edwin Focused Ion Beam Fabrication |
| title | Focused Ion Beam Fabrication |
| title_full | Focused Ion Beam Fabrication |
| title_fullStr | Focused Ion Beam Fabrication |
| title_full_unstemmed | Focused Ion Beam Fabrication |
| title_short | Focused Ion Beam Fabrication |
| title_sort | focused ion beam fabrication |
| topic | Focused Ion Beam Fabrication Focused Ion Beam System Connections Through Focused Ion Beam Milled Vias Mask Repair Ion Assisted Deposition |
| url | http://hdl.handle.net/1721.1/56945 |
| work_keys_str_mv | AT melngailisjohn focusedionbeamfabrication AT musilchristianr focusedionbeamfabrication AT stevenseugeneh focusedionbeamfabrication AT utlautmark focusedionbeamfabrication AT geismichaelw focusedionbeamfabrication AT mountainrobertw focusedionbeamfabrication AT lezechenrij focusedionbeamfabrication AT kellogedwin focusedionbeamfabrication |