Focused Ion Beam Fabrication

Focused Ion Beam Fabrication

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Contains reports on three research projects.

Bibliographic Details
Main Authors:	Melngailis, John, Musil, Christian R., Stevens, Eugene H., Utlaut, Mark, Geis, Michael W., Mountain, Robert W., Lezec, Henri J., Kellog, Edwin
Format:	Technical Report
Language:	English
Published:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:	Focused Ion Beam Fabrication Focused Ion Beam System Connections Through Focused Ion Beam Milled Vias Mask Repair Ion Assisted Deposition
Online Access:	http://hdl.handle.net/1721.1/56945

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