Focused Ion Beam Fabrication
Contains summary of research program and reports on four research projects.
| Main Authors: | , , , , , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
| Published: |
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/56969 |
| _version_ | 1826217170787368960 |
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| author | Musil, Christian Melngailis, John Stevens, Eugene H. Bartelt, John Utlaut, Mark Post, Richard Kellog, Edwin Geiss, Michael W. Mountain, Robert W. Shedd, Gordon M. Lezec, Henri J. Dubner, Andrew D. Jacobs, Jarvis B. Lowther, Rex E. Mahoney, Leonard J. Antoniadis, Dimitri A. |
| author_facet | Musil, Christian Melngailis, John Stevens, Eugene H. Bartelt, John Utlaut, Mark Post, Richard Kellog, Edwin Geiss, Michael W. Mountain, Robert W. Shedd, Gordon M. Lezec, Henri J. Dubner, Andrew D. Jacobs, Jarvis B. Lowther, Rex E. Mahoney, Leonard J. Antoniadis, Dimitri A. |
| author_sort | Musil, Christian |
| collection | MIT |
| description | Contains summary of research program and reports on four research projects. |
| first_indexed | 2024-09-23T16:59:09Z |
| format | Technical Report |
| id | mit-1721.1/56969 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T16:59:09Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/569692019-04-12T23:53:33Z Focused Ion Beam Fabrication Musil, Christian Melngailis, John Stevens, Eugene H. Bartelt, John Utlaut, Mark Post, Richard Kellog, Edwin Geiss, Michael W. Mountain, Robert W. Shedd, Gordon M. Lezec, Henri J. Dubner, Andrew D. Jacobs, Jarvis B. Lowther, Rex E. Mahoney, Leonard J. Antoniadis, Dimitri A. Focused Ion Beam Fabrication Focused Ion Beam Microsurgery of Integrated Circuits Ion Beam Assisted Deposition Fabrication of Graded Channel FET's in GaAs Fabrication of Graded Channel FET's in Si Measurement of Beam Profile Contains summary of research program and reports on four research projects. Charles Stark Draper Laboratory (Contract DL-H-225270) Hughes Research Laboratories International Business Machines, Inc. (Contract 456614) Nippon Telegraph and Telephone, Inc. U.S. Navy - Office of Naval Research (Contract N00014-84-K-0073) U.S. Department of Defense (Contract MDA903-85-C-0215) Hitachi Central Research Laboratory 2010-07-15T22:10:06Z 2010-07-15T22:10:06Z 1986-01 Technical Report RLE_PR_128_03 http://hdl.handle.net/1721.1/56969 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1986 Focused Ion Beam Fabrication Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Focused Ion Beam Fabrication Focused Ion Beam Microsurgery of Integrated Circuits Ion Beam Assisted Deposition Fabrication of Graded Channel FET's in GaAs Fabrication of Graded Channel FET's in Si Measurement of Beam Profile Musil, Christian Melngailis, John Stevens, Eugene H. Bartelt, John Utlaut, Mark Post, Richard Kellog, Edwin Geiss, Michael W. Mountain, Robert W. Shedd, Gordon M. Lezec, Henri J. Dubner, Andrew D. Jacobs, Jarvis B. Lowther, Rex E. Mahoney, Leonard J. Antoniadis, Dimitri A. Focused Ion Beam Fabrication |
| title | Focused Ion Beam Fabrication |
| title_full | Focused Ion Beam Fabrication |
| title_fullStr | Focused Ion Beam Fabrication |
| title_full_unstemmed | Focused Ion Beam Fabrication |
| title_short | Focused Ion Beam Fabrication |
| title_sort | focused ion beam fabrication |
| topic | Focused Ion Beam Fabrication Focused Ion Beam Microsurgery of Integrated Circuits Ion Beam Assisted Deposition Fabrication of Graded Channel FET's in GaAs Fabrication of Graded Channel FET's in Si Measurement of Beam Profile |
| url | http://hdl.handle.net/1721.1/56969 |
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