Focused Ion Beam Fabrication

Focused Ion Beam Fabrication

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Contains summary of research program and reports on four research projects.

Bibliographic Details
Main Authors: Musil, Christian, Melngailis, John, Stevens, Eugene H., Bartelt, John, Utlaut, Mark, Post, Richard, Kellog, Edwin, Geiss, Michael W., Mountain, Robert W., Shedd, Gordon M., Lezec, Henri J., Dubner, Andrew D., Jacobs, Jarvis B., Lowther, Rex E., Mahoney, Leonard J., Antoniadis, Dimitri A.
Format: Technical Report
Language:English
Published: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:
Focused Ion Beam Fabrication
Focused Ion Beam Microsurgery of Integrated Circuits
Ion Beam Assisted Deposition
Fabrication of Graded Channel FET's in GaAs
Fabrication of Graded Channel FET's in Si
Measurement of Beam Profile
Online Access:http://hdl.handle.net/1721.1/56969

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