Focused Ion Beam Fabrication

Focused Ion Beam Fabrication

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Contains reports on five research projects.

Bibliographic Details
Main Authors:	Melngailis, John, Lezec, Henri J., Mahoney, Leonard J., Jacobs, Jarvis B., Lowther, Rex E., Musil, Christian R., Antoniadis, Dimitri A., Shedd, Gordon M., Dubner, Andrew D., Thompson, Carl V., Barrett, J. L., Thompson, W. B.
Format:	Technical Report
Language:	English
Published:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:	Focused Ion Beam Fabrication Focused Ion Beam Program Fabrication of Graded Channel FETs in GaAs Fabrication of Graded Channel FETs in Si Ion Induced Deposition Focused Ion Beam Microsurgery for Electronics Measurement of Beam Profile
Online Access:	http://hdl.handle.net/1721.1/57005

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