Focused Ion Beam Fabrication

Focused Ion Beam Fabrication

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Contains reports on five research projects.

מידע ביבליוגרפי
Main Authors: Melngailis, John, Lezec, Henri J., Mahoney, Leonard J., Jacobs, Jarvis B., Lowther, Rex E., Musil, Christian R., Antoniadis, Dimitri A., Shedd, Gordon M., Dubner, Andrew D., Thompson, Carl V., Barrett, J. L., Thompson, W. B.
פורמט: Technical Report
שפה:English
יצא לאור: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
נושאים:
Focused Ion Beam Fabrication
Focused Ion Beam Program
Fabrication of Graded Channel FETs in GaAs
Fabrication of Graded Channel FETs in Si
Ion Induced Deposition
Focused Ion Beam Microsurgery for Electronics
Measurement of Beam Profile
גישה מקוונת:http://hdl.handle.net/1721.1/57005
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