Submicron Structures Technology and Research
Contains reports on sixteen research projects.
| Main Authors: | , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
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Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/57008 |
| _version_ | 1826193679170142208 |
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| author | Anderson, Erik H. Carter, James M. Chu, William Komatsu, Kazu Quek, Hui Meng Yen, Anthony T. Plotnik, Irving Schattenburg, Mark L. Smith, Henry I. Akhtar, Salmon Ku, Yao C. Toth, Markus Porter, Mark Antoniadis, Dimitri A. Field, S. Kastner, Marc A. Licini, Jerome C. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Ismail, Khalid Orlando, Terry P. Shahidi, Ghavam G. Chou, Stephen Y. Ajuria, Sergio Atwater, Henry A. Floro, Jerrold A. Garrison, Stephen M. Palmer, Joyce E. Thompson, Carl V. Canizares, Claude R. |
| author_facet | Anderson, Erik H. Carter, James M. Chu, William Komatsu, Kazu Quek, Hui Meng Yen, Anthony T. Plotnik, Irving Schattenburg, Mark L. Smith, Henry I. Akhtar, Salmon Ku, Yao C. Toth, Markus Porter, Mark Antoniadis, Dimitri A. Field, S. Kastner, Marc A. Licini, Jerome C. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Ismail, Khalid Orlando, Terry P. Shahidi, Ghavam G. Chou, Stephen Y. Ajuria, Sergio Atwater, Henry A. Floro, Jerrold A. Garrison, Stephen M. Palmer, Joyce E. Thompson, Carl V. Canizares, Claude R. |
| author_sort | Anderson, Erik H. |
| collection | MIT |
| description | Contains reports on sixteen research projects. |
| first_indexed | 2024-09-23T09:42:58Z |
| format | Technical Report |
| id | mit-1721.1/57008 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T09:42:58Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/570082019-04-13T00:05:03Z Submicron Structures Technology and Research Anderson, Erik H. Carter, James M. Chu, William Komatsu, Kazu Quek, Hui Meng Yen, Anthony T. Plotnik, Irving Schattenburg, Mark L. Smith, Henry I. Akhtar, Salmon Ku, Yao C. Toth, Markus Porter, Mark Antoniadis, Dimitri A. Field, S. Kastner, Marc A. Licini, Jerome C. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Ismail, Khalid Orlando, Terry P. Shahidi, Ghavam G. Chou, Stephen Y. Ajuria, Sergio Atwater, Henry A. Floro, Jerrold A. Garrison, Stephen M. Palmer, Joyce E. Thompson, Carl V. Canizares, Claude R. Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Improved Mask Technology for X-Ray Lithography Theoretical Analysis of the Lithography Process Electronic Conduction in One-Dimensional Semiconductor Devices Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 μm Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in III-V Field-Effect Transistors Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines Electron Transport in MOSFETs in Si with Deep-Submicron Channel Lengths Application of the Shubnikov-de Haas Oscillations in Characterization of Si MOSFETs Application of the Shubnikov-de Haas Oscillations in Characterization of GaAs MODFETs Crystalline Films on Amorphous Substrates Ion-Beam-Enhanced Grain Growth in Thin Films Epitaxy via Surface-Energy-Driven Grain Growth Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings Contains reports on sixteen research projects. Joint Services Electronics Program (Contract DAALO3-86-K-0002) National Science Foundation (Grant ECS 85-06565) Lawrence Livermore Laboratory (Subcontract 9459005) Semiconductor Research Corporation (Contract 86-05-080) Joint Services Electronics Program (Contract DAAG-29-83-K-0003) National Science Foundation (Grant ECS 85-03443) U.S. Air Force - Office of Scientific Research (Contract AFOSR-85-0376) U.S. Air Force - Office of Scientific Research (Contract AFOSR-85-0154) U.S. Air Force - Office of Scientific Research (Grant AFSOSR 85-0154) Exxon Foundation National Aeronautics and Space Administration (Grant NGL22-009-683) Collaboration with KMS Fusion, Inc. 2010-07-16T03:40:14Z 2010-07-16T03:40:14Z 1987-01 Technical Report RLE_PR_129_01 http://hdl.handle.net/1721.1/57008 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1987 Submicron Structures Technology and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 129 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Improved Mask Technology for X-Ray Lithography Theoretical Analysis of the Lithography Process Electronic Conduction in One-Dimensional Semiconductor Devices Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 μm Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in III-V Field-Effect Transistors Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines Electron Transport in MOSFETs in Si with Deep-Submicron Channel Lengths Application of the Shubnikov-de Haas Oscillations in Characterization of Si MOSFETs Application of the Shubnikov-de Haas Oscillations in Characterization of GaAs MODFETs Crystalline Films on Amorphous Substrates Ion-Beam-Enhanced Grain Growth in Thin Films Epitaxy via Surface-Energy-Driven Grain Growth Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings Anderson, Erik H. Carter, James M. Chu, William Komatsu, Kazu Quek, Hui Meng Yen, Anthony T. Plotnik, Irving Schattenburg, Mark L. Smith, Henry I. Akhtar, Salmon Ku, Yao C. Toth, Markus Porter, Mark Antoniadis, Dimitri A. Field, S. Kastner, Marc A. Licini, Jerome C. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Ismail, Khalid Orlando, Terry P. Shahidi, Ghavam G. Chou, Stephen Y. Ajuria, Sergio Atwater, Henry A. Floro, Jerrold A. Garrison, Stephen M. Palmer, Joyce E. Thompson, Carl V. Canizares, Claude R. Submicron Structures Technology and Research |
| title | Submicron Structures Technology and Research |
| title_full | Submicron Structures Technology and Research |
| title_fullStr | Submicron Structures Technology and Research |
| title_full_unstemmed | Submicron Structures Technology and Research |
| title_short | Submicron Structures Technology and Research |
| title_sort | submicron structures technology and research |
| topic | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Improved Mask Technology for X-Ray Lithography Theoretical Analysis of the Lithography Process Electronic Conduction in One-Dimensional Semiconductor Devices Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 μm Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in III-V Field-Effect Transistors Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines Electron Transport in MOSFETs in Si with Deep-Submicron Channel Lengths Application of the Shubnikov-de Haas Oscillations in Characterization of Si MOSFETs Application of the Shubnikov-de Haas Oscillations in Characterization of GaAs MODFETs Crystalline Films on Amorphous Substrates Ion-Beam-Enhanced Grain Growth in Thin Films Epitaxy via Surface-Energy-Driven Grain Growth Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings |
| url | http://hdl.handle.net/1721.1/57008 |
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