Focused Ion Beam Fabrication
Contains reports on four sections of one research project.
| Main Authors: | , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
| Published: |
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/57025 |
| _version_ | 1811072564789772288 |
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| author | Lezec, Henri J. Shepard, Mark I. Melngailis, John Mahoney, Leonard J. Musil, Christian R. Ismail, Khalid Antoniadis, Dimitri A. Herndon, Terry O. Ro, Jaesang Dubner, Andrew D. Blauner, Patricia G. Thompson, Carl V. |
| author_facet | Lezec, Henri J. Shepard, Mark I. Melngailis, John Mahoney, Leonard J. Musil, Christian R. Ismail, Khalid Antoniadis, Dimitri A. Herndon, Terry O. Ro, Jaesang Dubner, Andrew D. Blauner, Patricia G. Thompson, Carl V. |
| author_sort | Lezec, Henri J. |
| collection | MIT |
| description | Contains reports on four sections of one research project. |
| first_indexed | 2024-09-23T09:07:56Z |
| format | Technical Report |
| id | mit-1721.1/57025 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T09:07:56Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/570252019-04-10T20:54:31Z Focused Ion Beam Fabrication Lezec, Henri J. Shepard, Mark I. Melngailis, John Mahoney, Leonard J. Musil, Christian R. Ismail, Khalid Antoniadis, Dimitri A. Herndon, Terry O. Ro, Jaesang Dubner, Andrew D. Blauner, Patricia G. Thompson, Carl V. Focused Ion Beam Fabrication Focused Ion Beam Program Contains reports on four sections of one research project. Microsystems Technology Laboratories Defense Advanced Research Projects Agency/Naval Electronics Systems Command (Contract MDA 903-85-C-0215) U.S. Air Force (through Lincoln Laboratory) Defense Advanced Research Projects Agency (through Lincoln Laboratory) Charles Stark Draper Laboratory, Inc. (Contract DL-H-261827) Hitachi Central Research Laboratory Nippon Telegraph & Telephone U.S. Army Research Office (Contract DAALO3-87-K-0126) 2010-07-16T03:46:13Z 2010-07-16T03:46:13Z 1987-01-01 to 1987-12-31 Technical Report RLE_PR_130_03 http://hdl.handle.net/1721.1/57025 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1987 Focused Ion Beam Fabrication Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 130 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Focused Ion Beam Fabrication Focused Ion Beam Program Lezec, Henri J. Shepard, Mark I. Melngailis, John Mahoney, Leonard J. Musil, Christian R. Ismail, Khalid Antoniadis, Dimitri A. Herndon, Terry O. Ro, Jaesang Dubner, Andrew D. Blauner, Patricia G. Thompson, Carl V. Focused Ion Beam Fabrication |
| title | Focused Ion Beam Fabrication |
| title_full | Focused Ion Beam Fabrication |
| title_fullStr | Focused Ion Beam Fabrication |
| title_full_unstemmed | Focused Ion Beam Fabrication |
| title_short | Focused Ion Beam Fabrication |
| title_sort | focused ion beam fabrication |
| topic | Focused Ion Beam Fabrication Focused Ion Beam Program |
| url | http://hdl.handle.net/1721.1/57025 |
| work_keys_str_mv | AT lezechenrij focusedionbeamfabrication AT shepardmarki focusedionbeamfabrication AT melngailisjohn focusedionbeamfabrication AT mahoneyleonardj focusedionbeamfabrication AT musilchristianr focusedionbeamfabrication AT ismailkhalid focusedionbeamfabrication AT antoniadisdimitria focusedionbeamfabrication AT herndonterryo focusedionbeamfabrication AT rojaesang focusedionbeamfabrication AT dubnerandrewd focusedionbeamfabrication AT blaunerpatriciag focusedionbeamfabrication AT thompsoncarlv focusedionbeamfabrication |