Kinetic Phenomena in Thin Film Electronic Materials
Contains reports on seven research projects.
Main Authors: | , , , , , , , , , , , , , , , , , , , , , , , |
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Format: | Technical Report |
Language: | English |
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Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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Online Access: | http://hdl.handle.net/1721.1/57032 |
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author | Ajuria, Sergio Quek, Hui Meng Thompson, Carl V. Smith, Henry I. Kim, Hyoung-June Atwater, Harry A. Floro, Jerrold A. Frost, Harold J. Palmer, Joyce E. Chong, Tow Fonstad, Clifton G. Im, James S. Tomita, Hisashi Smith, David A. Jiran, Eva Cammarata, Robert C. Clevenger, Lawrence A. Tu, King-Ning Cho, Jaeshin Kahn, Hal Longworth, Hai P. Ro, Jaesang Dubner, Andrew D. Melngailis, John |
author_facet | Ajuria, Sergio Quek, Hui Meng Thompson, Carl V. Smith, Henry I. Kim, Hyoung-June Atwater, Harry A. Floro, Jerrold A. Frost, Harold J. Palmer, Joyce E. Chong, Tow Fonstad, Clifton G. Im, James S. Tomita, Hisashi Smith, David A. Jiran, Eva Cammarata, Robert C. Clevenger, Lawrence A. Tu, King-Ning Cho, Jaeshin Kahn, Hal Longworth, Hai P. Ro, Jaesang Dubner, Andrew D. Melngailis, John |
author_sort | Ajuria, Sergio |
collection | MIT |
description | Contains reports on seven research projects. |
first_indexed | 2024-09-23T10:07:09Z |
format | Technical Report |
id | mit-1721.1/57032 |
institution | Massachusetts Institute of Technology |
language | English |
last_indexed | 2024-09-23T10:07:09Z |
publishDate | 2010 |
publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
record_format | dspace |
spelling | mit-1721.1/570322019-04-12T23:53:35Z Kinetic Phenomena in Thin Film Electronic Materials Ajuria, Sergio Quek, Hui Meng Thompson, Carl V. Smith, Henry I. Kim, Hyoung-June Atwater, Harry A. Floro, Jerrold A. Frost, Harold J. Palmer, Joyce E. Chong, Tow Fonstad, Clifton G. Im, James S. Tomita, Hisashi Smith, David A. Jiran, Eva Cammarata, Robert C. Clevenger, Lawrence A. Tu, King-Ning Cho, Jaeshin Kahn, Hal Longworth, Hai P. Ro, Jaesang Dubner, Andrew D. Melngailis, John Kinetic Phenomena in Thin Film Electronic Materials Grain Growth in Thin Films Post-Nucleation Heteroepitaxy in Lattice Mismatched Systems Thin Film Zone Melting Recrystallization of Silicon Capillary Instabilities in Thin Solid Films Kinetics of Thin Film Silicide Formation Reliability of Interconnects Microstructures of Interconnects Focussed Ion Beam Induced Deposition Contains reports on seven research projects. National Science Foundation (Grant ECS 85-06565) U.S. Air Force - Office of Scientific Research (Contract AFOSR 85-0154) Semiconductor Research Corporation (Contract 87-SP-080) International Business Machines, Inc. (Faculty Development Award) National Science Foundation (Grant DMR 85-06030) International Business Machines, Inc. Sony Company Joint Services Electroncs Program (Contract DAALO3-86-K-0002) Charles Stark Draper Laboratories, Inc. (Contract DL-H-261827) Defense Advanced Research Projects Agency (Contract MDA 903-85-C-0215) Nippon Telephone and Telegraph, Inc. 2010-07-16T03:48:32Z 2010-07-16T03:48:32Z 1987-01-01 to 1987-12-31 Technical Report RLE_PR_130_02 http://hdl.handle.net/1721.1/57032 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1987 Kinetic Phenomena in Thin Film Electronic Materials Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 130 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
spellingShingle | Kinetic Phenomena in Thin Film Electronic Materials Grain Growth in Thin Films Post-Nucleation Heteroepitaxy in Lattice Mismatched Systems Thin Film Zone Melting Recrystallization of Silicon Capillary Instabilities in Thin Solid Films Kinetics of Thin Film Silicide Formation Reliability of Interconnects Microstructures of Interconnects Focussed Ion Beam Induced Deposition Ajuria, Sergio Quek, Hui Meng Thompson, Carl V. Smith, Henry I. Kim, Hyoung-June Atwater, Harry A. Floro, Jerrold A. Frost, Harold J. Palmer, Joyce E. Chong, Tow Fonstad, Clifton G. Im, James S. Tomita, Hisashi Smith, David A. Jiran, Eva Cammarata, Robert C. Clevenger, Lawrence A. Tu, King-Ning Cho, Jaeshin Kahn, Hal Longworth, Hai P. Ro, Jaesang Dubner, Andrew D. Melngailis, John Kinetic Phenomena in Thin Film Electronic Materials |
title | Kinetic Phenomena in Thin Film Electronic Materials |
title_full | Kinetic Phenomena in Thin Film Electronic Materials |
title_fullStr | Kinetic Phenomena in Thin Film Electronic Materials |
title_full_unstemmed | Kinetic Phenomena in Thin Film Electronic Materials |
title_short | Kinetic Phenomena in Thin Film Electronic Materials |
title_sort | kinetic phenomena in thin film electronic materials |
topic | Kinetic Phenomena in Thin Film Electronic Materials Grain Growth in Thin Films Post-Nucleation Heteroepitaxy in Lattice Mismatched Systems Thin Film Zone Melting Recrystallization of Silicon Capillary Instabilities in Thin Solid Films Kinetics of Thin Film Silicide Formation Reliability of Interconnects Microstructures of Interconnects Focussed Ion Beam Induced Deposition |
url | http://hdl.handle.net/1721.1/57032 |
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