Submicron Structures Technology and Research
Contains table of contents for Part I, table of contents for Section 1 and reports on thirteen research projects.
| Main Authors: | , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
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Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Online Access: | http://hdl.handle.net/1721.1/57116 |
| _version_ | 1811006881912586240 |
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| author | Smith, Henry I. Burkhardt, Martin Carter, James M. Chu, William Early, Kathleen R. Ghanbari, Reza A. Ku, Yao-Ching Moel, Alberto Quek, Hui Meng Schattenburg, Mark L. The, Siang-Chun Yen, Anthony T. Lu, Kenneth P. Su, Lisa T-F. Gutierrez, JoAnne M. Tsai, Flora S. Antoniadis, Dimitri A. Carlin, Gregory A. Meyer, Paul G. Shahidi, Ghavam G. Field, Stuart B. Kastner, Marc A. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Orlando, Terry P. del Alamo, Jesus A. Ismail, Khalid Liu, C. T. Smith, T. P. Tsui, Daniel Canizares, Claude R. Floro, Jerold A. Thompson, Carl V. |
| author_facet | Smith, Henry I. Burkhardt, Martin Carter, James M. Chu, William Early, Kathleen R. Ghanbari, Reza A. Ku, Yao-Ching Moel, Alberto Quek, Hui Meng Schattenburg, Mark L. The, Siang-Chun Yen, Anthony T. Lu, Kenneth P. Su, Lisa T-F. Gutierrez, JoAnne M. Tsai, Flora S. Antoniadis, Dimitri A. Carlin, Gregory A. Meyer, Paul G. Shahidi, Ghavam G. Field, Stuart B. Kastner, Marc A. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Orlando, Terry P. del Alamo, Jesus A. Ismail, Khalid Liu, C. T. Smith, T. P. Tsui, Daniel Canizares, Claude R. Floro, Jerold A. Thompson, Carl V. |
| author_sort | Smith, Henry I. |
| collection | MIT |
| description | Contains table of contents for Part I, table of contents for Section 1 and reports on thirteen research projects. |
| first_indexed | 2024-09-23T16:59:10Z |
| format | Technical Report |
| id | mit-1721.1/57116 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T16:59:10Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/571162019-04-12T23:49:13Z Submicron Structures Technology and Research Smith, Henry I. Burkhardt, Martin Carter, James M. Chu, William Early, Kathleen R. Ghanbari, Reza A. Ku, Yao-Ching Moel, Alberto Quek, Hui Meng Schattenburg, Mark L. The, Siang-Chun Yen, Anthony T. Lu, Kenneth P. Su, Lisa T-F. Gutierrez, JoAnne M. Tsai, Flora S. Antoniadis, Dimitri A. Carlin, Gregory A. Meyer, Paul G. Shahidi, Ghavam G. Field, Stuart B. Kastner, Marc A. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Orlando, Terry P. del Alamo, Jesus A. Ismail, Khalid Liu, C. T. Smith, T. P. Tsui, Daniel Canizares, Claude R. Floro, Jerold A. Thompson, Carl V. Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 100nm and Below Improved Mask Technology For X-Ray Lithography Electron Transport in Si MOSFETs with Deep-Submicron Channel Lengths Electronic Conduction in One-Dimensional Semiconductor Devices Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 μm-Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires Mobility Modulation in GaAs/AIGaAs Quantum Wires Arrays of Field-Effect-Induced Quantum Dots Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFETs) Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy Submicrometer-Period Gold Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical Spectroscopy Epitaxy via Surface-Energy-Driven Grain Growth Contains table of contents for Part I, table of contents for Section 1 and reports on thirteen research projects. Joint Services Electronics Program Contract DAAL03-89-C-0001 National Science Foundation Grant ECS 87-09806 Semiconductor Research Corporation Contract 87-SP-080 Hampshire Instruments Corporation National Science Foundation Grant ECS-85-03443 U.S. Air Force - Office of Scientific Research Grant AFOSR-88-0304 U.S. Air Force - Office of Scientific Research Grant AFOSR-85-0154 X-Opt., Incorporated National Aeronautics and Space Administration Contract NAS8-36748 AT&T Bell Laboratories 2010-07-16T04:11:22Z 2010-07-16T04:11:22Z 1989-01-01 to 1989-12-31 Technical Report RLE_PR_132_01_01s_01 http://hdl.handle.net/1721.1/57116 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1989 Solid State Physics, Electronics and Optics Materials and Fabrication Submicron Structures Technology and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 132 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 100nm and Below Improved Mask Technology For X-Ray Lithography Electron Transport in Si MOSFETs with Deep-Submicron Channel Lengths Electronic Conduction in One-Dimensional Semiconductor Devices Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 μm-Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires Mobility Modulation in GaAs/AIGaAs Quantum Wires Arrays of Field-Effect-Induced Quantum Dots Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFETs) Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy Submicrometer-Period Gold Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical Spectroscopy Epitaxy via Surface-Energy-Driven Grain Growth Smith, Henry I. Burkhardt, Martin Carter, James M. Chu, William Early, Kathleen R. Ghanbari, Reza A. Ku, Yao-Ching Moel, Alberto Quek, Hui Meng Schattenburg, Mark L. The, Siang-Chun Yen, Anthony T. Lu, Kenneth P. Su, Lisa T-F. Gutierrez, JoAnne M. Tsai, Flora S. Antoniadis, Dimitri A. Carlin, Gregory A. Meyer, Paul G. Shahidi, Ghavam G. Field, Stuart B. Kastner, Marc A. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Orlando, Terry P. del Alamo, Jesus A. Ismail, Khalid Liu, C. T. Smith, T. P. Tsui, Daniel Canizares, Claude R. Floro, Jerold A. Thompson, Carl V. Submicron Structures Technology and Research |
| title | Submicron Structures Technology and Research |
| title_full | Submicron Structures Technology and Research |
| title_fullStr | Submicron Structures Technology and Research |
| title_full_unstemmed | Submicron Structures Technology and Research |
| title_short | Submicron Structures Technology and Research |
| title_sort | submicron structures technology and research |
| topic | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 100nm and Below Improved Mask Technology For X-Ray Lithography Electron Transport in Si MOSFETs with Deep-Submicron Channel Lengths Electronic Conduction in One-Dimensional Semiconductor Devices Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 μm-Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires Mobility Modulation in GaAs/AIGaAs Quantum Wires Arrays of Field-Effect-Induced Quantum Dots Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFETs) Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy Submicrometer-Period Gold Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical Spectroscopy Epitaxy via Surface-Energy-Driven Grain Growth |
| url | http://hdl.handle.net/1721.1/57116 |
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