Submicron Structures Technology and Research

Submicron Structures Technology and Research

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Contains table of contents for Part I, table of contents for Section 1 and reports on thirteen research projects.

Bibliographic Details
Main Authors:	Smith, Henry I., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ghanbari, Reza A., Ku, Yao-Ching, Moel, Alberto, Quek, Hui Meng, Schattenburg, Mark L., The, Siang-Chun, Yen, Anthony T., Lu, Kenneth P., Su, Lisa T-F., Gutierrez, JoAnne M., Tsai, Flora S., Antoniadis, Dimitri A., Carlin, Gregory A., Meyer, Paul G., Shahidi, Ghavam G., Field, Stuart B., Kastner, Marc A., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Orlando, Terry P., del Alamo, Jesus A., Ismail, Khalid, Liu, C. T., Smith, T. P., Tsui, Daniel, Canizares, Claude R., Floro, Jerold A., Thompson, Carl V.
Format:	Technical Report
Language:	English
Published:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:	Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 100nm and Below Improved Mask Technology For X-Ray Lithography Electron Transport in Si MOSFETs with Deep-Submicron Channel Lengths Electronic Conduction in One-Dimensional Semiconductor Devices Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 μm-Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires Mobility Modulation in GaAs/AIGaAs Quantum Wires Arrays of Field-Effect-Induced Quantum Dots Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFETs) Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy Submicrometer-Period Gold Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical Spectroscopy Epitaxy via Surface-Energy-Driven Grain Growth
Online Access:	http://hdl.handle.net/1721.1/57116

Submicron Structures Technology and Research

Submicron Structures Technology and Research by Smith, Henry I., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ghanbari, Reza A., Ku, Yao-Ching, Moel, Alberto M., Schattenburg, Mark L., The, Siang-Chun, Yen, Anthony T., Gutierrez, JoAnne M., Lu, Kenneth P., Ng, Lee-Peng, Salyani, Shahir R., Su, Lisa T-F., Tsai, Flora S., Wey, Lead, Antoniadis, Dimitri A., Carlin, Gregory A., Fang, Hao, Hu, Hang, Field, Stuart B., Kastner, Marc A., Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Orlando, Terry P., del Alamo, Jesus A., Ismail, Khalid, Yee, Kenneth, Evans, Keith, Liu, C. T., Shayegan, M., Smith, T. P., Tsui, Daniel, Zhao, Yang, Canizares, Claude R., Floro, Jerrold A., Thompson, Carl V.

Published 2010

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Technical Report

Submicron Structures Technology and Research

Submicron Structures Technology and Research by Anderson, Erik H., Plotnik, Irving, Schattenburg, Mark L., Melngailis, John, Smith, Henry I., Kwasnick, Robert F., Licini, Jerome C., Kastner, Marc A., Lee, Patrick A., Warren, Alan C., Antoniadis, Dimitri A., Chou, Stephen Y., Shahidi, Ghavam G., Ippen, Erich P., Palmer, Joyce E., Wong, Chee C., Yonehara, Takao, Garrison, Stephen M., Atwater, Harry A., Thompson, Carl V., Schott, Stephen C., Canizares, Claude R., Stein, Josephine A., Summa, Deborah A., Rajchman, Jan A., Paynter, Henry M., Chen, Dong-Pei, Haus, Hermann A.

Published 2010

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Technical Report

Submicron Structures Technology and Research

Submicron Structures Technology and Research by Anderson, Erik H., Carter, James M., Chu, William, Quek, Hui Meng, Plotnik, Irving, Schattenburg, Mark L., Yen, Anthony T., Smith, Henry I., Ku, Yao-C., Field, S. B., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Antoniadis, Dimitri A., Kastner, Marc A., Bagwell, Phillip F., Orlando, Terry P., Ismail, Khalid, Shahidi, Ghavam G., Ajuria, Sergio, Atwater, Harry A., Floro, Jerrold A., Thompson, Carl V., Palmer, Joyce E., Canizares, Claude R.

Published 2010

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Technical Report

Submicron Structures Technology and Research

Submicron Structures Technology and Research by Anderson, Erik H., Carter, James M., Chu, William, Komatsu, Kazu, Quek, Hui Meng, Yen, Anthony T., Plotnik, Irving, Schattenburg, Mark L., Smith, Henry I., Akhtar, Salmon, Ku, Yao C., Toth, Markus, Porter, Mark, Antoniadis, Dimitri A., Field, S., Kastner, Marc A., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Ismail, Khalid, Orlando, Terry P., Shahidi, Ghavam G., Chou, Stephen Y., Ajuria, Sergio, Atwater, Henry A., Floro, Jerrold A., Garrison, Stephen M., Palmer, Joyce E., Thompson, Carl V., Canizares, Claude R.

Published 2010

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Technical Report

Submicron Structures Technology and Research

Submicron Structures Technology and Research by Anderson, Erik H., Chu, William, Plotnik, Irving, Schattenburg, Mark L., Smith, Henry I., Yen, Anthony T., Warren, Alan C., Antoniadis, Dimitri A., Orlando, Terry P., Melngailis, John, Chou, Stephen Y., Shahidi, Ghavam G., Licini, Jerome C., Scott-Thomas, John H. F., Park, Samuel L., Kastner, Marc A., Atwater, Harry A., Garrison, Stephen M., Palmer, Joyce E., Quek, Hui Meng, Wong, Chee C., Thompson, Carl V., Canizaares, Claude C., Stein, Josephine A., Summa, Deborah A., Paynter, Henry M., Rajchman, Jan A., Tse, Ming K.

Published 2010

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Technical Report

Submicron Structures Technology and Research

Submicron Structures Technology and Research by Anderson, Erik H., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ku, Yao-Ching, Quek, Hui Meng, Moel, Alberto, Schattenburg, Mark L., Smith, Henry I., Yen, Anthony T., Plotnik, Irving, Kawata, Hiroaki, Antoniadis, Dimitri A., Field, Stuart B., Kastner, Marc A., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Orlando, Terry P., Ismail, Khalid, Meyer, Paul, Shahidi, Ghavam G., The, Siang-Chun, Ajuria, Sergio, Floro, Jerrold A., Thompson, Carl V., III, Palmer, Joyce E., Canizares, Claude R.

Published 2010

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Technical Report

Submicron Structures Technology and Research

Submicron Structures Technology and Research by Anderson, Erik H., Hawryluk, Andrew M., Plotnik, Irving, Smith, Henry I., Lezec, Henri J., Melngailis, John, Kwasnick, Robert F., Licini, Jerome C., Kastner, Marc A., Lee, Patrick A., Warren, Alan C., Antoniadis, Dimitri A., Chou, Stephen Y., Thompson, Carl V., Yonehara, Takao, Wong, Chee C., Atwater, Harry A., Schattenburg, Mark L., Ceglio, Natale M., Jr., Canizares, Claude R., Stein, Josephine A., Summa, Deborah A., Rajchman, Jan A., Paynter, Henry M., Chen, Dong-Pei, Islam, Mohammed, Haus, Hermann A.

Published 2010

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Technical Report