Submicron Structures Technology and Research
Contains table of contents for Part I, table of contents for Section 1, description of Submicron Structures Laboratory research, reports on twelve research project and a list of publications.
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| Format: | Technical Report |
| Language: | English |
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Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Online Access: | http://hdl.handle.net/1721.1/57151 |
| _version_ | 1826203966360256512 |
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| author | Smith, Henry I. Burkhardt, Martin Carter, James M. Chu, William Early, Kathleen R. Ghanbari, Reza A. Ku, Yao-Ching Moel, Alberto M. Schattenburg, Mark L. The, Siang-Chun Yen, Anthony T. Gutierrez, JoAnne M. Lu, Kenneth P. Ng, Lee-Peng Salyani, Shahir R. Su, Lisa T-F. Tsai, Flora S. Wey, Lead Antoniadis, Dimitri A. Carlin, Gregory A. Fang, Hao Hu, Hang Field, Stuart B. Kastner, Marc A. Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Orlando, Terry P. del Alamo, Jesus A. Ismail, Khalid Yee, Kenneth Evans, Keith Liu, C. T. Shayegan, M. Smith, T. P. Tsui, Daniel Zhao, Yang Canizares, Claude R. Floro, Jerrold A. Thompson, Carl V. |
| author_facet | Smith, Henry I. Burkhardt, Martin Carter, James M. Chu, William Early, Kathleen R. Ghanbari, Reza A. Ku, Yao-Ching Moel, Alberto M. Schattenburg, Mark L. The, Siang-Chun Yen, Anthony T. Gutierrez, JoAnne M. Lu, Kenneth P. Ng, Lee-Peng Salyani, Shahir R. Su, Lisa T-F. Tsai, Flora S. Wey, Lead Antoniadis, Dimitri A. Carlin, Gregory A. Fang, Hao Hu, Hang Field, Stuart B. Kastner, Marc A. Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Orlando, Terry P. del Alamo, Jesus A. Ismail, Khalid Yee, Kenneth Evans, Keith Liu, C. T. Shayegan, M. Smith, T. P. Tsui, Daniel Zhao, Yang Canizares, Claude R. Floro, Jerrold A. Thompson, Carl V. |
| author_sort | Smith, Henry I. |
| collection | MIT |
| description | Contains table of contents for Part I, table of contents for Section 1, description of Submicron Structures Laboratory research, reports on twelve research project and a list of publications. |
| first_indexed | 2024-09-23T12:46:44Z |
| format | Technical Report |
| id | mit-1721.1/57151 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T12:46:44Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/571512019-04-13T00:02:27Z Submicron Structures Technology and Research Smith, Henry I. Burkhardt, Martin Carter, James M. Chu, William Early, Kathleen R. Ghanbari, Reza A. Ku, Yao-Ching Moel, Alberto M. Schattenburg, Mark L. The, Siang-Chun Yen, Anthony T. Gutierrez, JoAnne M. Lu, Kenneth P. Ng, Lee-Peng Salyani, Shahir R. Su, Lisa T-F. Tsai, Flora S. Wey, Lead Antoniadis, Dimitri A. Carlin, Gregory A. Fang, Hao Hu, Hang Field, Stuart B. Kastner, Marc A. Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Orlando, Terry P. del Alamo, Jesus A. Ismail, Khalid Yee, Kenneth Evans, Keith Liu, C. T. Shayegan, M. Smith, T. P. Tsui, Daniel Zhao, Yang Canizares, Claude R. Floro, Jerrold A. Thompson, Carl V. Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 100 nm and Below Improved Mask Technology for X-Ray Lithography Electron Transport in Si MOSFETs with Deep-Submicron Channel Lengths Electronic Conduction in One-Dimensional Semiconductor Devices Lateral-Surface-Superlattice in Si Quantum Wire Arrays in Si Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires Mobility Modulation in GaAs/AIGaAs Quantum Wires Arrays of Field-Effect-Induced Quantum Dots Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET) Submicrometer-Period Transmission Gratings for X-Ray Spectroscopy Submicrometer-Period Transmission Gratings for X-Ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Epitaxy via Surface-Energy-Driven Grain Growth Publications Contains table of contents for Part I, table of contents for Section 1, description of Submicron Structures Laboratory research, reports on twelve research project and a list of publications. Joint Services Electronics Program Contract DAAL03-89-C-0001 National Science Foundation Grant ECS 87-09806 Semiconductor Research Corporation Contract 90-SP-080 U.S. Navy - Naval Research Laboratory Contract N00014-90-K-2018 National Science Foundation Grant ECS 85-03443 U.S. Air Force - Office of Scientific Research Grant AFOSR 88-0304 U.S. Air Force - Office of Scientific Research Grant AFOSR 85-0154 X-OPT, Inc. National Aeronautics and Space Administration Contract NAS8-36748 AT&T Bell Laboratories 2010-07-16T04:20:34Z 2010-07-16T04:20:34Z 1990-01-01 to 1990-12-31 Technical Report RLE_PR_133_01_01s_01 http://hdl.handle.net/1721.1/57151 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1990 Solid State Physics, Electronics and Optics Materials and Fabrication Submicron Structures Technology and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 133 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 100 nm and Below Improved Mask Technology for X-Ray Lithography Electron Transport in Si MOSFETs with Deep-Submicron Channel Lengths Electronic Conduction in One-Dimensional Semiconductor Devices Lateral-Surface-Superlattice in Si Quantum Wire Arrays in Si Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires Mobility Modulation in GaAs/AIGaAs Quantum Wires Arrays of Field-Effect-Induced Quantum Dots Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET) Submicrometer-Period Transmission Gratings for X-Ray Spectroscopy Submicrometer-Period Transmission Gratings for X-Ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Epitaxy via Surface-Energy-Driven Grain Growth Publications Smith, Henry I. Burkhardt, Martin Carter, James M. Chu, William Early, Kathleen R. Ghanbari, Reza A. Ku, Yao-Ching Moel, Alberto M. Schattenburg, Mark L. The, Siang-Chun Yen, Anthony T. Gutierrez, JoAnne M. Lu, Kenneth P. Ng, Lee-Peng Salyani, Shahir R. Su, Lisa T-F. Tsai, Flora S. Wey, Lead Antoniadis, Dimitri A. Carlin, Gregory A. Fang, Hao Hu, Hang Field, Stuart B. Kastner, Marc A. Park, Samuel L. Scott-Thomas, John H. F. Bagwell, Phillip F. Orlando, Terry P. del Alamo, Jesus A. Ismail, Khalid Yee, Kenneth Evans, Keith Liu, C. T. Shayegan, M. Smith, T. P. Tsui, Daniel Zhao, Yang Canizares, Claude R. Floro, Jerrold A. Thompson, Carl V. Submicron Structures Technology and Research |
| title | Submicron Structures Technology and Research |
| title_full | Submicron Structures Technology and Research |
| title_fullStr | Submicron Structures Technology and Research |
| title_full_unstemmed | Submicron Structures Technology and Research |
| title_short | Submicron Structures Technology and Research |
| title_sort | submicron structures technology and research |
| topic | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 100 nm and Below Improved Mask Technology for X-Ray Lithography Electron Transport in Si MOSFETs with Deep-Submicron Channel Lengths Electronic Conduction in One-Dimensional Semiconductor Devices Lateral-Surface-Superlattice in Si Quantum Wire Arrays in Si Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires Mobility Modulation in GaAs/AIGaAs Quantum Wires Arrays of Field-Effect-Induced Quantum Dots Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET) Submicrometer-Period Transmission Gratings for X-Ray Spectroscopy Submicrometer-Period Transmission Gratings for X-Ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Epitaxy via Surface-Energy-Driven Grain Growth Publications |
| url | http://hdl.handle.net/1721.1/57151 |
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