Nanostructures Technology, Research, and Applications
Contains reports on seventeen research projects and a list of publications.
| Main Authors: | , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
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Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/57290 |
| _version_ | 1811089709446725632 |
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| author | Smith, Henry I. Silverman, Scott E. Ferrera, Juan Wong, Vincent V. Carter, James M. Hector, Scott D. Moon, Euclid E. Owen, Gabrielle M. Schattenburg, Mark L. Yang, Isabel Y. Burkhardt, Martin Li, Huiying Mondol, Mark K. Murphy, Edward Everett, Patrick N. Fleming, Robert C., Jr. Savas, Timothy A. Shah, Satyen N. Yasaka, Anto Jackson, Keith M. Antoniadis, Dimitri A. Gupta, Nitin Melloch, Michael R. Hugunin, James J. Fonstad, Clifton G., Jr. Damask, Jay N. Aucoin, Richard J. Canizares, Claude R. Porter, Jeanne M. Donovan, Sean M. Ismail, Khalid Kolodziejski, Leslie A. Thompson, Carl V. |
| author_facet | Smith, Henry I. Silverman, Scott E. Ferrera, Juan Wong, Vincent V. Carter, James M. Hector, Scott D. Moon, Euclid E. Owen, Gabrielle M. Schattenburg, Mark L. Yang, Isabel Y. Burkhardt, Martin Li, Huiying Mondol, Mark K. Murphy, Edward Everett, Patrick N. Fleming, Robert C., Jr. Savas, Timothy A. Shah, Satyen N. Yasaka, Anto Jackson, Keith M. Antoniadis, Dimitri A. Gupta, Nitin Melloch, Michael R. Hugunin, James J. Fonstad, Clifton G., Jr. Damask, Jay N. Aucoin, Richard J. Canizares, Claude R. Porter, Jeanne M. Donovan, Sean M. Ismail, Khalid Kolodziejski, Leslie A. Thompson, Carl V. |
| author_sort | Smith, Henry I. |
| collection | MIT |
| description | Contains reports on seventeen research projects and a list of publications. |
| first_indexed | 2024-09-23T14:23:27Z |
| format | Technical Report |
| id | mit-1721.1/57290 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T14:23:27Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/572902019-04-13T00:05:04Z Nanostructures Technology, Research, and Applications Smith, Henry I. Silverman, Scott E. Ferrera, Juan Wong, Vincent V. Carter, James M. Hector, Scott D. Moon, Euclid E. Owen, Gabrielle M. Schattenburg, Mark L. Yang, Isabel Y. Burkhardt, Martin Li, Huiying Mondol, Mark K. Murphy, Edward Everett, Patrick N. Fleming, Robert C., Jr. Savas, Timothy A. Shah, Satyen N. Yasaka, Anto Jackson, Keith M. Antoniadis, Dimitri A. Gupta, Nitin Melloch, Michael R. Hugunin, James J. Fonstad, Clifton G., Jr. Damask, Jay N. Aucoin, Richard J. Canizares, Claude R. Porter, Jeanne M. Donovan, Sean M. Ismail, Khalid Kolodziejski, Leslie A. Thompson, Carl V. Nanostructures Technology Nanostructures Research Nanostructures Applications NanoStructures Laboratory Scanning Electron Beam Lithography Spatial-Phase-Locked Electron-Beam Lithography X-Ray Nanolithography Improved Mask Technology for X-Ray Lithography High-Precision Mask Alignment System Interferometric Lithography Ion-Beam Lithography High-Performance Self-aligned Sub-100 nm MOSFETs Using X-ray Lithography Fabrication of T-gate Devices using X-ray Lithography Coulomb Charging Effects in Semiconductor Nanostructures Coulomb Charging Tunneling in Semiconductor Nanostructures Superconductor/Semiconductor Interface of V₃Si Superconductor/Semiconductor Interface of Si Laterally-Coupled Distributed-Feedback Lasers Fabricated by X-Ray Lithography Combined Spatial-Phase-Locked Electron-Beam for Channel-Dropping Filters Combined Spatial-Phase-Locked X-ray for Channel-Dropping Filters Combined Spatial-Phase-Locked Optical Lithography for Channel-Dropping Filters High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry GaAs Epitaxy on Sawtooth-Patterned Silicon Contains reports on seventeen research projects and a list of publications. Joint Services Electronics Program Contract DAAL03-92-C-0001 Joint Services Electronics Program Grant DAAH04-95-1-0038 Semiconductor Research Corporation Contract 94-MJ-550 National Science Foundation Grant ECS 94-07078 U.S. Army Research Office Contract DAAL03-92-G-0291 Advanced Research Projects Agency/Naval Air Systems Command Contract N00019-92-K-0021 National Aeronautics and Space Administration Contract NAS8-36748 National Aeronautics and Space Administration Grant NAGW-2003 IBM Corporation Contract 1622 U.S. Army Research Office Grant DAAH04-94-G-0377 U.S. Air Force - Office of Scientific Research Grant F-49-620-92-J-0064 2010-07-16T20:33:45Z 2010-07-16T20:33:45Z 1994-01-01 to 1994-12-31 Technical Report RLE_PR_137_01_02s_05 http://hdl.handle.net/1721.1/57290 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1994 Solid State Physics, Electronics and Optics Quantum-Effect Devices Nanostructures Technology, Research, and Applications Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 137 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Nanostructures Technology Nanostructures Research Nanostructures Applications NanoStructures Laboratory Scanning Electron Beam Lithography Spatial-Phase-Locked Electron-Beam Lithography X-Ray Nanolithography Improved Mask Technology for X-Ray Lithography High-Precision Mask Alignment System Interferometric Lithography Ion-Beam Lithography High-Performance Self-aligned Sub-100 nm MOSFETs Using X-ray Lithography Fabrication of T-gate Devices using X-ray Lithography Coulomb Charging Effects in Semiconductor Nanostructures Coulomb Charging Tunneling in Semiconductor Nanostructures Superconductor/Semiconductor Interface of V₃Si Superconductor/Semiconductor Interface of Si Laterally-Coupled Distributed-Feedback Lasers Fabricated by X-Ray Lithography Combined Spatial-Phase-Locked Electron-Beam for Channel-Dropping Filters Combined Spatial-Phase-Locked X-ray for Channel-Dropping Filters Combined Spatial-Phase-Locked Optical Lithography for Channel-Dropping Filters High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry GaAs Epitaxy on Sawtooth-Patterned Silicon Smith, Henry I. Silverman, Scott E. Ferrera, Juan Wong, Vincent V. Carter, James M. Hector, Scott D. Moon, Euclid E. Owen, Gabrielle M. Schattenburg, Mark L. Yang, Isabel Y. Burkhardt, Martin Li, Huiying Mondol, Mark K. Murphy, Edward Everett, Patrick N. Fleming, Robert C., Jr. Savas, Timothy A. Shah, Satyen N. Yasaka, Anto Jackson, Keith M. Antoniadis, Dimitri A. Gupta, Nitin Melloch, Michael R. Hugunin, James J. Fonstad, Clifton G., Jr. Damask, Jay N. Aucoin, Richard J. Canizares, Claude R. Porter, Jeanne M. Donovan, Sean M. Ismail, Khalid Kolodziejski, Leslie A. Thompson, Carl V. Nanostructures Technology, Research, and Applications |
| title | Nanostructures Technology, Research, and Applications |
| title_full | Nanostructures Technology, Research, and Applications |
| title_fullStr | Nanostructures Technology, Research, and Applications |
| title_full_unstemmed | Nanostructures Technology, Research, and Applications |
| title_short | Nanostructures Technology, Research, and Applications |
| title_sort | nanostructures technology research and applications |
| topic | Nanostructures Technology Nanostructures Research Nanostructures Applications NanoStructures Laboratory Scanning Electron Beam Lithography Spatial-Phase-Locked Electron-Beam Lithography X-Ray Nanolithography Improved Mask Technology for X-Ray Lithography High-Precision Mask Alignment System Interferometric Lithography Ion-Beam Lithography High-Performance Self-aligned Sub-100 nm MOSFETs Using X-ray Lithography Fabrication of T-gate Devices using X-ray Lithography Coulomb Charging Effects in Semiconductor Nanostructures Coulomb Charging Tunneling in Semiconductor Nanostructures Superconductor/Semiconductor Interface of V₃Si Superconductor/Semiconductor Interface of Si Laterally-Coupled Distributed-Feedback Lasers Fabricated by X-Ray Lithography Combined Spatial-Phase-Locked Electron-Beam for Channel-Dropping Filters Combined Spatial-Phase-Locked X-ray for Channel-Dropping Filters Combined Spatial-Phase-Locked Optical Lithography for Channel-Dropping Filters High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry GaAs Epitaxy on Sawtooth-Patterned Silicon |
| url | http://hdl.handle.net/1721.1/57290 |
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