Nanostructures Technology, Research, and Applications

Nanostructures Technology, Research, and Applications

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Contains reports on seventeen research projects and a list of publications.

Bibliographic Details
Main Authors:	Smith, Henry I., Silverman, Scott E., Ferrera, Juan, Wong, Vincent V., Carter, James M., Hector, Scott D., Moon, Euclid E., Owen, Gabrielle M., Schattenburg, Mark L., Yang, Isabel Y., Burkhardt, Martin, Li, Huiying, Mondol, Mark K., Murphy, Edward, Everett, Patrick N., Fleming, Robert C., Jr., Savas, Timothy A., Shah, Satyen N., Yasaka, Anto, Jackson, Keith M., Antoniadis, Dimitri A., Gupta, Nitin, Melloch, Michael R., Hugunin, James J., Fonstad, Clifton G., Jr., Damask, Jay N., Aucoin, Richard J., Canizares, Claude R., Porter, Jeanne M., Donovan, Sean M., Ismail, Khalid, Kolodziejski, Leslie A., Thompson, Carl V.
Format:	Technical Report
Language:	English
Published:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:	Nanostructures Technology Nanostructures Research Nanostructures Applications NanoStructures Laboratory Scanning Electron Beam Lithography Spatial-Phase-Locked Electron-Beam Lithography X-Ray Nanolithography Improved Mask Technology for X-Ray Lithography High-Precision Mask Alignment System Interferometric Lithography Ion-Beam Lithography High-Performance Self-aligned Sub-100 nm MOSFETs Using X-ray Lithography Fabrication of T-gate Devices using X-ray Lithography Coulomb Charging Effects in Semiconductor Nanostructures Coulomb Charging Tunneling in Semiconductor Nanostructures Superconductor/Semiconductor Interface of V₃Si Superconductor/Semiconductor Interface of Si Laterally-Coupled Distributed-Feedback Lasers Fabricated by X-Ray Lithography Combined Spatial-Phase-Locked Electron-Beam for Channel-Dropping Filters Combined Spatial-Phase-Locked X-ray for Channel-Dropping Filters Combined Spatial-Phase-Locked Optical Lithography for Channel-Dropping Filters High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry GaAs Epitaxy on Sawtooth-Patterned Silicon
Online Access:	http://hdl.handle.net/1721.1/57290

Internet

http://hdl.handle.net/1721.1/57290