High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications

Two-photon excitation microfabrication has been shown to be useful in the field of photonics and biomedicine. It generates 3D microstructures and provides sub-diffraction fabrication resolution. Nevertheless, laser direct writing, the most popular two-photon fabrication technique, has slow fabricati...

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Main Authors: Kim, Daekeun, So, Peter T. C.
Other Authors: Massachusetts Institute of Technology. Department of Biological Engineering
Format: Article
Language:en_US
Published: Society of Photo-optical Instrumentation Engineers 2010
Online Access:http://hdl.handle.net/1721.1/58557
https://orcid.org/0000-0003-4698-6488
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author Kim, Daekeun
So, Peter T. C.
author2 Massachusetts Institute of Technology. Department of Biological Engineering
author_facet Massachusetts Institute of Technology. Department of Biological Engineering
Kim, Daekeun
So, Peter T. C.
author_sort Kim, Daekeun
collection MIT
description Two-photon excitation microfabrication has been shown to be useful in the field of photonics and biomedicine. It generates 3D microstructures and provides sub-diffraction fabrication resolution. Nevertheless, laser direct writing, the most popular two-photon fabrication technique, has slow fabrication speed, and its applications are limited to prototyping. In this proceeding, we propose high-throughput 3D lithographic microfabrication system based on depthresolved wide-field illumination and build several 3D microstructures with SU-8. Through these fabrications, 3D lithographic microfabrication has scalable function and high-throughput capability. It also has the potential for fabricating 3D microstructure in biomedical applications, such as intertwining channels in 3D microfluidic devices for biomedical analysis and 3D cell patterning in the tissue scaffolds.
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spelling mit-1721.1/585572022-09-30T08:51:47Z High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications Kim, Daekeun So, Peter T. C. Massachusetts Institute of Technology. Department of Biological Engineering Massachusetts Institute of Technology. Department of Mechanical Engineering So, Peter T. C. Kim, Daekeun So, Peter T. C. Two-photon excitation microfabrication has been shown to be useful in the field of photonics and biomedicine. It generates 3D microstructures and provides sub-diffraction fabrication resolution. Nevertheless, laser direct writing, the most popular two-photon fabrication technique, has slow fabrication speed, and its applications are limited to prototyping. In this proceeding, we propose high-throughput 3D lithographic microfabrication system based on depthresolved wide-field illumination and build several 3D microstructures with SU-8. Through these fabrications, 3D lithographic microfabrication has scalable function and high-throughput capability. It also has the potential for fabricating 3D microstructure in biomedical applications, such as intertwining channels in 3D microfluidic devices for biomedical analysis and 3D cell patterning in the tissue scaffolds. Singapore-MIT Alliance Singapore-MIT Alliance for Research and Technology Massachusetts Institute of Technology. Deshphande Center for Technological Innovation 2010-09-15T20:10:08Z 2010-09-15T20:10:08Z 2010-02 2010-01 Article http://purl.org/eprint/type/JournalArticle 0277-786X Proc. of SPIE Vol. 7569 75691V-4 http://hdl.handle.net/1721.1/58557 Kim, Daekeun, and Peter T. C. So. “High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications.” Multiphoton Microscopy in the Biomedical Sciences X. Ed. Ammasi Periasamy, Peter T. C. So, & Karsten Konig. San Francisco, California, USA: SPIE, 2010. 75691V-5. ©2010 SPIE--The International Society for Optical Engineering. https://orcid.org/0000-0003-4698-6488 en_US http://dx.doi.org/10.1117/12.843160 Proceedings of SPIE--the International Society for Optical Engineering; v.7569 Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Society of Photo-optical Instrumentation Engineers SPIE
spellingShingle Kim, Daekeun
So, Peter T. C.
High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
title High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
title_full High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
title_fullStr High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
title_full_unstemmed High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
title_short High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
title_sort high throughput three dimensional 3d lithographic microfabrication in biomedical applications
url http://hdl.handle.net/1721.1/58557
https://orcid.org/0000-0003-4698-6488
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