Fabrication of high aspect ratio silicon nanostructure arrays by metal-assisted etching

Fabrication of high aspect ratio silicon nanostructure arrays by metal-assisted etching

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2010.

Bibliographic Details
Main Author: Chang, Shih-wei, Ph.D. Massachusetts Institute of Technology
Other Authors: Carl V. Thompson.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2010
Subjects:
Materials Science and Engineering.
Online Access:http://hdl.handle.net/1721.1/59214
Description
Summary:Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2010.

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