A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor
This paper reports the design, fabrication, and experimental characterization of a fully microfabricated planar array of externally fed electrospray emitters that produces heavy molecular ions from the ionic liquids EMI-BF[subcript 4] and EMI-Im. The microelectromechanical systems (MEMS) electrospra...
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| Format: | Article |
| Language: | en_US |
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Institute of Electrical and Electronics Engineers
2010
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| Online Access: | http://hdl.handle.net/1721.1/59347 https://orcid.org/0000-0003-3001-9223 |
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| author | Gassend, Blaise Velasquez-Garcia, Luis Fernando Akinwande, Akintunde Ibitayo Martinez-Sanchez, Manuel |
| author2 | Massachusetts Institute of Technology. Department of Aeronautics and Astronautics |
| author_facet | Massachusetts Institute of Technology. Department of Aeronautics and Astronautics Gassend, Blaise Velasquez-Garcia, Luis Fernando Akinwande, Akintunde Ibitayo Martinez-Sanchez, Manuel |
| author_sort | Gassend, Blaise |
| collection | MIT |
| description | This paper reports the design, fabrication, and experimental characterization of a fully microfabricated planar array of externally fed electrospray emitters that produces heavy molecular ions from the ionic liquids EMI-BF[subcript 4] and EMI-Im. The microelectromechanical systems (MEMS) electrospray array is composed of the following two microfabricated parts: 1) an emitter die with as many as 502 emitters in 1.13 cm[superscript 2] and 2) an extractor component that provides assembly alignment, electrical insulation, and a common bias voltage to the emitter array. The devices were created using Pyrex and silicon substrates, as well as microfabrication techniques such as deep reactive ion etching, low-temperature fusion bonding, and anodic bonding. The emitters are coated with black silicon, which acts as a wicking material for transporting the liquid to the emitter tips. The extractor electrode uses a 3-D MEMS packaging technology that allows hand assembly of the two components with micrometer-level precision. Experimental characterization of the MEMS electrospray array includes current-voltage characteristics, time-of-flight mass spectrometry, beam divergence, and imprints on a collector. The data show that with both ionic liquids and in both polarities, the electrospray array works in the pure ionic regime, emitting ions with as little as 500 V of bias voltage. The data suggest that the MEMS electrospray array ion source could be used in applications such as coating, printing, etching, and nanosatellite propulsion. |
| first_indexed | 2024-09-23T11:32:58Z |
| format | Article |
| id | mit-1721.1/59347 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T11:32:58Z |
| publishDate | 2010 |
| publisher | Institute of Electrical and Electronics Engineers |
| record_format | dspace |
| spelling | mit-1721.1/593472022-10-01T04:21:33Z A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor Gassend, Blaise Velasquez-Garcia, Luis Fernando Akinwande, Akintunde Ibitayo Martinez-Sanchez, Manuel Massachusetts Institute of Technology. Department of Aeronautics and Astronautics Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Microsystems Technology Laboratories Akinwande, Akintunde Ibitayo Dimarogonas, Blaise Velasquez-Garcia, Luis Fernando Akinwande, Akintunde Ibitayo Martinez-Sanchez, Manuel 3-D packaging Black silicon electrospray array ion source ionic liquid This paper reports the design, fabrication, and experimental characterization of a fully microfabricated planar array of externally fed electrospray emitters that produces heavy molecular ions from the ionic liquids EMI-BF[subcript 4] and EMI-Im. The microelectromechanical systems (MEMS) electrospray array is composed of the following two microfabricated parts: 1) an emitter die with as many as 502 emitters in 1.13 cm[superscript 2] and 2) an extractor component that provides assembly alignment, electrical insulation, and a common bias voltage to the emitter array. The devices were created using Pyrex and silicon substrates, as well as microfabrication techniques such as deep reactive ion etching, low-temperature fusion bonding, and anodic bonding. The emitters are coated with black silicon, which acts as a wicking material for transporting the liquid to the emitter tips. The extractor electrode uses a 3-D MEMS packaging technology that allows hand assembly of the two components with micrometer-level precision. Experimental characterization of the MEMS electrospray array includes current-voltage characteristics, time-of-flight mass spectrometry, beam divergence, and imprints on a collector. The data show that with both ionic liquids and in both polarities, the electrospray array works in the pure ionic regime, emitting ions with as little as 500 V of bias voltage. The data suggest that the MEMS electrospray array ion source could be used in applications such as coating, printing, etching, and nanosatellite propulsion. Devadas, Srinivas United States. Air Force Office of Scientific Research Space and Naval Warfare Systems Center San Diego (U.S.) (Award N66001-04-1-8925) United States. Defense Advanced Research Projects Agency. Microsystems Technology Office and U.S. Army Soldier and Biological Chemical Command. Soldier Systems Center (Contract W911QY-05-1-0002) 2010-10-14T20:20:24Z 2010-10-14T20:20:24Z 2009-06 2009-01 Article http://purl.org/eprint/type/JournalArticle 1057-7157 INSPEC Accession Number: 10712714 http://hdl.handle.net/1721.1/59347 Gassend, B. et al. “A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor.” Microelectromechanical Systems, Journal of 18.3 (2009): 679-694. © 2009 IEEE https://orcid.org/0000-0003-3001-9223 en_US http://dx.doi.org/10.1109/JMEMS.2009.2015475 Journal of Microelectromechanical Systems Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Institute of Electrical and Electronics Engineers IEEE |
| spellingShingle | 3-D packaging Black silicon electrospray array ion source ionic liquid Gassend, Blaise Velasquez-Garcia, Luis Fernando Akinwande, Akintunde Ibitayo Martinez-Sanchez, Manuel A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor |
| title | A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor |
| title_full | A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor |
| title_fullStr | A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor |
| title_full_unstemmed | A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor |
| title_short | A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor |
| title_sort | microfabricated planar electrospray array ionic liquid ion source with integrated extractor |
| topic | 3-D packaging Black silicon electrospray array ion source ionic liquid |
| url | http://hdl.handle.net/1721.1/59347 https://orcid.org/0000-0003-3001-9223 |
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