A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor

A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor

This paper reports the design, fabrication, and experimental characterization of a fully microfabricated planar array of externally fed electrospray emitters that produces heavy molecular ions from the ionic liquids EMI-BF[subcript 4] and EMI-Im. The microelectromechanical systems (MEMS) electrospra...

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Bibliographic Details
Main Authors: Gassend, Blaise, Velasquez-Garcia, Luis Fernando, Akinwande, Akintunde Ibitayo, Martinez-Sanchez, Manuel
Other Authors: Massachusetts Institute of Technology. Department of Aeronautics and Astronautics
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers 2010
Subjects:
3-D packaging
Black silicon
electrospray array
ion source
ionic liquid
Online Access:http://hdl.handle.net/1721.1/59347
https://orcid.org/0000-0003-3001-9223

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