Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications

Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications

A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM.

Bibliographic Details
Main Authors: Stojanovic, Vladimir Marko, Chen, Fred Fu-Chin, Fariborzi, Hossein, Spencer, Matthew, Nathanael, Rhesa, Wang, Chengcheng, Gupta, Abhinav, Kam, Hei, Pott, Vincent, Jeon, Jaeseok, Liu, Tsu-Jae King, Markovic, Dejan, Alon, Elad
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers 2011
Online Access:http://hdl.handle.net/1721.1/60377
Description
Summary:A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM.

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