Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications
A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM.
| Main Authors: | , , , , , , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Institute of Electrical and Electronics Engineers
2011
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| Online Access: | http://hdl.handle.net/1721.1/60377 |
| _version_ | 1826208589356728320 |
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| author | Stojanovic, Vladimir Marko Chen, Fred Fu-Chin Fariborzi, Hossein Spencer, Matthew Nathanael, Rhesa Wang, Chengcheng Gupta, Abhinav Kam, Hei Pott, Vincent Jeon, Jaeseok Liu, Tsu-Jae King Markovic, Dejan Alon, Elad |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Stojanovic, Vladimir Marko Chen, Fred Fu-Chin Fariborzi, Hossein Spencer, Matthew Nathanael, Rhesa Wang, Chengcheng Gupta, Abhinav Kam, Hei Pott, Vincent Jeon, Jaeseok Liu, Tsu-Jae King Markovic, Dejan Alon, Elad |
| author_sort | Stojanovic, Vladimir Marko |
| collection | MIT |
| description | A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM. |
| first_indexed | 2024-09-23T14:07:41Z |
| format | Article |
| id | mit-1721.1/60377 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T14:07:41Z |
| publishDate | 2011 |
| publisher | Institute of Electrical and Electronics Engineers |
| record_format | dspace |
| spelling | mit-1721.1/603772022-10-01T19:22:05Z Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications Stojanovic, Vladimir Marko Chen, Fred Fu-Chin Fariborzi, Hossein Spencer, Matthew Nathanael, Rhesa Wang, Chengcheng Gupta, Abhinav Kam, Hei Pott, Vincent Jeon, Jaeseok Liu, Tsu-Jae King Markovic, Dejan Alon, Elad Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Stojanovic, Vladimir Marko Stojanovic, Vladimir Marko Chen, Fred Fu-Chin Fariborzi, Hossein A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM. National Science Foundation (U.S.) (Infrastructure Grant No. 0403427) United States. Defense Advanced Research Projects Agency Semiconductor Research Corporation. Center for Materials, Structures and Devices Semiconductor Research Corporation. Center for Circuit and System Solutions Berkeley Wireless Research Center 2011-01-03T22:36:20Z 2011-01-03T22:36:20Z 2010-02 Article http://purl.org/eprint/type/ConferencePaper 978-1-4244-6033-5 0193-6530 INSPEC Accession Number: 11204907 http://hdl.handle.net/1721.1/60377 Chen, F. et al. “Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications.” Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International. 2010. 150-151. © 2010, IEEE en_US http://dx.doi.org/10.1109/ISSCC.2010.5434010 IEEE International Solid-State Circuits Conference. Digest of technical papers Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Institute of Electrical and Electronics Engineers MIT web domain |
| spellingShingle | Stojanovic, Vladimir Marko Chen, Fred Fu-Chin Fariborzi, Hossein Spencer, Matthew Nathanael, Rhesa Wang, Chengcheng Gupta, Abhinav Kam, Hei Pott, Vincent Jeon, Jaeseok Liu, Tsu-Jae King Markovic, Dejan Alon, Elad Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications |
| title | Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications |
| title_full | Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications |
| title_fullStr | Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications |
| title_full_unstemmed | Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications |
| title_short | Demonstration of Integrated Mico-Electro-Mechanical Switch Circuits for VLSI Applications |
| title_sort | demonstration of integrated mico electro mechanical switch circuits for vlsi applications |
| url | http://hdl.handle.net/1721.1/60377 |
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