Development of a high-speed profilometer for manufacturing inspection
Optical digital-imaging techniques offer a fast, high-resolution, and wide-range metrology capability for measuring semi-transparent and transparent polymer-based devices during manufacture. This work presents novel instrumentation for in-process statistical control and metrology capable of measurin...
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
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SPIE
2011
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| Online Access: | http://hdl.handle.net/1721.1/60936 |
| _version_ | 1826197089092108288 |
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| author | Ljubicic, Dean M. Anthony, Brian |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Ljubicic, Dean M. Anthony, Brian |
| author_sort | Ljubicic, Dean M. |
| collection | MIT |
| description | Optical digital-imaging techniques offer a fast, high-resolution, and wide-range metrology capability for measuring semi-transparent and transparent polymer-based devices during manufacture. This work presents novel instrumentation for in-process statistical control and metrology capable of measuring a complete macroscale part (~25 mm) down to its microscale features (~50 μm). The high speed 2.5D profilometer has generated contour plots with 0.4 μm lateral and 1 μm vertical resolution. The instrument has an estimated data rate of 8 million 3D data points per second, approximately 270 times faster than conventional white light interferometry. |
| first_indexed | 2024-09-23T10:42:18Z |
| format | Article |
| id | mit-1721.1/60936 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T10:42:18Z |
| publishDate | 2011 |
| publisher | SPIE |
| record_format | dspace |
| spelling | mit-1721.1/609362022-09-27T14:23:53Z Development of a high-speed profilometer for manufacturing inspection Ljubicic, Dean M. Anthony, Brian Massachusetts Institute of Technology. Department of Mechanical Engineering Massachusetts Institute of Technology. Laboratory for Manufacturing and Productivity Anthony, Brian Ljubicic, Dean M. Anthony, Brian Optical digital-imaging techniques offer a fast, high-resolution, and wide-range metrology capability for measuring semi-transparent and transparent polymer-based devices during manufacture. This work presents novel instrumentation for in-process statistical control and metrology capable of measuring a complete macroscale part (~25 mm) down to its microscale features (~50 μm). The high speed 2.5D profilometer has generated contour plots with 0.4 μm lateral and 1 μm vertical resolution. The instrument has an estimated data rate of 8 million 3D data points per second, approximately 270 times faster than conventional white light interferometry. 2011-02-14T14:51:00Z 2011-02-14T14:51:00Z 2010-08 2010-08 Article http://purl.org/eprint/type/ConferencePaper 0277-786X http://hdl.handle.net/1721.1/60936 Dean M. Ljubicic and Brian Anthony, "Development of a high-speed profilometer for manufacturing inspection", Proc. SPIE 7767, 776705 (2010); doi:10.1117/12.860166 © 2010 COPYRIGHT SPIE en_US http://dx.doi.org/10.1117/12.860166 Proceedings of SPIE--the International Society for Optical Engineering Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf SPIE SPIE |
| spellingShingle | Ljubicic, Dean M. Anthony, Brian Development of a high-speed profilometer for manufacturing inspection |
| title | Development of a high-speed profilometer for manufacturing inspection |
| title_full | Development of a high-speed profilometer for manufacturing inspection |
| title_fullStr | Development of a high-speed profilometer for manufacturing inspection |
| title_full_unstemmed | Development of a high-speed profilometer for manufacturing inspection |
| title_short | Development of a high-speed profilometer for manufacturing inspection |
| title_sort | development of a high speed profilometer for manufacturing inspection |
| url | http://hdl.handle.net/1721.1/60936 |
| work_keys_str_mv | AT ljubicicdeanm developmentofahighspeedprofilometerformanufacturinginspection AT anthonybrian developmentofahighspeedprofilometerformanufacturinginspection |