Development of a high-speed profilometer for manufacturing inspection
Optical digital-imaging techniques offer a fast, high-resolution, and wide-range metrology capability for measuring semi-transparent and transparent polymer-based devices during manufacture. This work presents novel instrumentation for in-process statistical control and metrology capable of measurin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
SPIE
2011
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| Online Access: | http://hdl.handle.net/1721.1/60936 |