On the development of a low-cost lithographic interferometer
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2010.
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2011
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| Online Access: | http://hdl.handle.net/1721.1/62105 |
| _version_ | 1826205773213990912 |
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| author | Korre, Hasan |
| author2 | Karl K. Berggren. |
| author_facet | Karl K. Berggren. Korre, Hasan |
| author_sort | Korre, Hasan |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2010. |
| first_indexed | 2024-09-23T13:18:51Z |
| format | Thesis |
| id | mit-1721.1/62105 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:18:51Z |
| publishDate | 2011 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/621052019-04-12T11:56:54Z On the development of a low-cost lithographic interferometer Korre, Hasan Karl K. Berggren. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2010. Cataloged from PDF version of thesis. Includes bibliographical references (p. 61-63). Interference lithography is a technique for making one- and two-dimensional periodic nanostructures using interference of two coherent light beams. Despite their successes, the size, maintenance, and cost of interference lithography tools have prevented periodic nanostructures from being ubiquitous in academia and industry. Here, a novel approach is described whereby the conventional optical source - a bulky and expensive metal-vapor laser - is replaced by a newly available, low-cost blue laser diode. Additionally, the passive alignment of a lens tube is utilized to simplify the construction of a spatial filter. The resulting custom-built interference lithography tool is able to print large-area (~ cm2 ) periodic patterns. The tool has a small footprint (~0.2 M2 ) and can be assembled for less than 6000 USD. by Hasan Korre. S.M. 2011-04-04T17:43:16Z 2011-04-04T17:43:16Z 2010 2010 Thesis http://hdl.handle.net/1721.1/62105 707936872 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 63 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Korre, Hasan On the development of a low-cost lithographic interferometer |
| title | On the development of a low-cost lithographic interferometer |
| title_full | On the development of a low-cost lithographic interferometer |
| title_fullStr | On the development of a low-cost lithographic interferometer |
| title_full_unstemmed | On the development of a low-cost lithographic interferometer |
| title_short | On the development of a low-cost lithographic interferometer |
| title_sort | on the development of a low cost lithographic interferometer |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/62105 |
| work_keys_str_mv | AT korrehasan onthedevelopmentofalowcostlithographicinterferometer |