Thermally actuated MEMS seal for vacuum applications

Thermally actuated MEMS seal for vacuum applications

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011.

Bibliographic Details
Main Author: Dighe, Aalap (Aalap Shirish)
Other Authors: Carol Livermore.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2012
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/68938

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