Design and testing of a microvalve capable of precisely controlling low fluidic flow rates
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011.
| Main Authors: | , |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2012
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| Online Access: | http://hdl.handle.net/1721.1/70428 |
| _version_ | 1826191262921785344 |
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| author | Daniel, Cody R Sepp, Toomas R |
| author2 | Martin L. Culpepper. |
| author_facet | Martin L. Culpepper. Daniel, Cody R Sepp, Toomas R |
| author_sort | Daniel, Cody R |
| collection | MIT |
| description | Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011. |
| first_indexed | 2024-09-23T08:53:30Z |
| format | Thesis |
| id | mit-1721.1/70428 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T08:53:30Z |
| publishDate | 2012 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/704282019-04-10T14:26:27Z Design and testing of a microvalve capable of precisely controlling low fluidic flow rates Daniel, Cody R Sepp, Toomas R Martin L. Culpepper. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Mechanical Engineering. Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011. Cataloged from PDF version of thesis. Includes bibliographical references (p. 48). Development of the design, manufacture, and testing for a gas flow regulating microvalve is presented herein. The microvalve project served as a test bed for new micromachining techniques and for exploration of MEMS devices made from non-silicon materials. We developed and tested a novel microvalve utilizing a passive mechanical membrane that allows for accurate flow rate control over a wide range of inlet pressures, requiring power only to adjust the flow rate. Design considerations and functional analysis of a microvalve system are discussed, and manufacturing techniques analyzed. The design was verified by comparing the prototyped system to a commercially available mini ball valve. The valves were run through full actuation at varying pressures and the resulting flow was observed and characterized. At 0.69 MPa, the flexure valve prototype was shown to allow adjustments in flow between 1.0* 10-6 and 2.0* 106 m3/s over the period of about 8 seconds, allowing for a precision adjustment of flow not available in other valves. The experiment demonstrates that the new microvalve offers significant advantages in terms of a wider range of flow rate adjustment available within the operating pressure regime. by Cody R. Daniel and Toomas R. Sepp. S.B. 2012-04-26T18:52:31Z 2012-04-26T18:52:31Z 2011 2011 Thesis http://hdl.handle.net/1721.1/70428 785209605 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 54 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering. Daniel, Cody R Sepp, Toomas R Design and testing of a microvalve capable of precisely controlling low fluidic flow rates |
| title | Design and testing of a microvalve capable of precisely controlling low fluidic flow rates |
| title_full | Design and testing of a microvalve capable of precisely controlling low fluidic flow rates |
| title_fullStr | Design and testing of a microvalve capable of precisely controlling low fluidic flow rates |
| title_full_unstemmed | Design and testing of a microvalve capable of precisely controlling low fluidic flow rates |
| title_short | Design and testing of a microvalve capable of precisely controlling low fluidic flow rates |
| title_sort | design and testing of a microvalve capable of precisely controlling low fluidic flow rates |
| topic | Mechanical Engineering. |
| url | http://hdl.handle.net/1721.1/70428 |
| work_keys_str_mv | AT danielcodyr designandtestingofamicrovalvecapableofpreciselycontrollinglowfluidicflowrates AT sepptoomasr designandtestingofamicrovalvecapableofpreciselycontrollinglowfluidicflowrates |