Internal Dielectric Transduction in Bulk-Mode Resonators

Internal Dielectric Transduction in Bulk-Mode Resonators

This paper investigates electrostatic transduction of a longitudinal-mode silicon acoustic resonator with internal dielectric films. Geometric optimization of internal dielectrically transduced resonators is derived analytically and shown experimentally. Analysis of internal dielectric transduction...

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Podrobná bibliografie
Hlavní autoři: Weinstein, Dana, Bhave, Sunil A.
Další autoři: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Médium: Článek
Jazyk:en_US
Vydáno: Institute of Electrical and Electronics Engineers (IEEE) 2012
On-line přístup:http://hdl.handle.net/1721.1/71800

Internet

http://hdl.handle.net/1721.1/71800

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