A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement
This paper presents a special configuration of white-light scanning interferometer, in which the measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator of the light source. Compared to the common white-light interferometer, the approac...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
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Institute of Electrical and Electronics Engineers (IEEE)
2012
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| Online Access: | http://hdl.handle.net/1721.1/71871 |
| _version_ | 1826205227807670272 |
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| author | Xu, Zhiguang Youcef-Toumi, Kamal Yoon, Soon Fatt |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Xu, Zhiguang Youcef-Toumi, Kamal Yoon, Soon Fatt |
| author_sort | Xu, Zhiguang |
| collection | MIT |
| description | This paper presents a special configuration of white-light scanning interferometer, in which the measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator of the light source. Compared to the common white-light interferometer, the approach avoids the influence of the chromatic dispersion of the planar plates on the gap thickness measurement. It possesses a large measurement range of from several hundreds of nanometers to tens of microns as well as a high resolution of 0.1 nm, but does not employ any expensive equipment like spectrometer or monochromator. These advantages make our approach quite competent for the practical applications. |
| first_indexed | 2024-09-23T13:09:22Z |
| format | Article |
| id | mit-1721.1/71871 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T13:09:22Z |
| publishDate | 2012 |
| publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| record_format | dspace |
| spelling | mit-1721.1/718712022-09-28T12:17:58Z A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement Xu, Zhiguang Youcef-Toumi, Kamal Yoon, Soon Fatt Massachusetts Institute of Technology. Department of Mechanical Engineering Youcef-Toumi, Kamal Xu, Zhiguang Youcef-Toumi, Kamal This paper presents a special configuration of white-light scanning interferometer, in which the measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator of the light source. Compared to the common white-light interferometer, the approach avoids the influence of the chromatic dispersion of the planar plates on the gap thickness measurement. It possesses a large measurement range of from several hundreds of nanometers to tens of microns as well as a high resolution of 0.1 nm, but does not employ any expensive equipment like spectrometer or monochromator. These advantages make our approach quite competent for the practical applications. 2012-07-27T15:38:55Z 2012-07-27T15:38:55Z 2009-11 2009-08 Article http://purl.org/eprint/type/ConferencePaper 978-1-4244-2382-8 http://hdl.handle.net/1721.1/71871 Xu, Zhiguang et al. “A Novel White-light Scanning Interferometer for Absolute Nano-scale Gap Thickness Measurement.” IEEE, 2009. 97–98. © Copyright 2009 IEEE en_US http://dx.doi.org/10.1109/OMEMS.2009.5338544 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Institute of Electrical and Electronics Engineers (IEEE) IEEE |
| spellingShingle | Xu, Zhiguang Youcef-Toumi, Kamal Yoon, Soon Fatt A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title | A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_full | A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_fullStr | A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_full_unstemmed | A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_short | A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_sort | novel white light scanning interferometer for absolute nano scale gap thickness measurement |
| url | http://hdl.handle.net/1721.1/71871 |
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