Thermal considerations for advanced SOI substrates designed for III-V/Si heterointegration

Thermal considerations for advanced SOI substrates designed for III-V/Si heterointegration

Silicon-on-lattice engineered substrates (SOLES) are SOI substrates with embedded Ge layers that facilitate III-V compound integration for advanced integrated circuits. The new materials integration scheme in SOLES requires the analysis of its thermal stability and diffusion barrier properties. In t...

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Dettagli Bibliografici
Autori principali:	Bulsara, Mayank, Fitzgerald, Eugene A., Yang, N., Liu, W. K., Lubyshev, D., Fastenau, J. M., Wu, Y., Urteaga, M., Ha, W., Bergman, J., Brar, B., Drazek, C., Daval, N., Benaissa, L., Augendre, E., Hoke, William E., LaRoche, J. R., Herrick, K. J., Kazior, T. E.
Altri autori:	Massachusetts Institute of Technology. Department of Materials Science and Engineering
Natura:	Articolo
Lingua:	en_US
Pubblicazione:	Institute of Electrical and Electronics Engineers (IEEE) 2012
Accesso online:	http://hdl.handle.net/1721.1/73512 https://orcid.org/0000-0002-1891-1959

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