An unreleased mm-wave resonant body transistor
In this work, we present the first fully unreleased Micro-Electro-Mechanical (MEM) resonator. The 1st harmonic longitudinal resonance of a silicon FinFET fully clad in SiO[subscript 2] is demonstrated. The device exhibits two resonances at 39 and 41 GHz, corresponding well with simulation results. T...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | en_US |
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Institute of Electrical and Electronics Engineers (IEEE)
2012
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| Online Access: | http://hdl.handle.net/1721.1/73576 |
| _version_ | 1826212724644773888 |
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| author | Wang, Wentao Popa, Laura Cornelia Marathe, Radhika A. Weinstein, Dana |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Wang, Wentao Popa, Laura Cornelia Marathe, Radhika A. Weinstein, Dana |
| author_sort | Wang, Wentao |
| collection | MIT |
| description | In this work, we present the first fully unreleased Micro-Electro-Mechanical (MEM) resonator. The 1st harmonic longitudinal resonance of a silicon FinFET fully clad in SiO[subscript 2] is demonstrated. The device exhibits two resonances at 39 and 41 GHz, corresponding well with simulation results. The quality factor (Q) of 129 at 39 GHz is ~4× lower than that of its released counterpart. Methods to improve Q and reduce spurious modes are introduced. This first demonstration of unreleased resonators in a hybrid MEMS-CMOS technology can provide RF and microwave CMOS circuit designers with active high-Q devices monolithically integrated in Front-End-of-Line (FEOL) processing without the need for post-processing or special packaging. |
| first_indexed | 2024-09-23T15:36:03Z |
| format | Article |
| id | mit-1721.1/73576 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T15:36:03Z |
| publishDate | 2012 |
| publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| record_format | dspace |
| spelling | mit-1721.1/735762022-09-29T14:58:48Z An unreleased mm-wave resonant body transistor Wang, Wentao Popa, Laura Cornelia Marathe, Radhika A. Weinstein, Dana Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Department of Mechanical Engineering Massachusetts Institute of Technology. Department of Physics Wang, Wentao Popa, Laura Cornelia Marathe, Radhika A. Weinstein, Dana In this work, we present the first fully unreleased Micro-Electro-Mechanical (MEM) resonator. The 1st harmonic longitudinal resonance of a silicon FinFET fully clad in SiO[subscript 2] is demonstrated. The device exhibits two resonances at 39 and 41 GHz, corresponding well with simulation results. The quality factor (Q) of 129 at 39 GHz is ~4× lower than that of its released counterpart. Methods to improve Q and reduce spurious modes are introduced. This first demonstration of unreleased resonators in a hybrid MEMS-CMOS technology can provide RF and microwave CMOS circuit designers with active high-Q devices monolithically integrated in Front-End-of-Line (FEOL) processing without the need for post-processing or special packaging. Microelectronics Advanced Research Corporation (MARCO) United States. Defense Advanced Research Projects Agency 2012-10-03T18:59:56Z 2012-10-03T18:59:56Z 2011-03 2011-01 Article http://purl.org/eprint/type/ConferencePaper 978-1-4244-9634-1 978-1-4244-9632-7 1084-6999 http://hdl.handle.net/1721.1/73576 Wang, Wentao et al. “An Unreleased Mm-wave Resonant Body Transistor.” IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011. 1341–1344. en_US http://dx.doi.org/10.1109/MEMSYS.2011.5734682 Proceedings of the IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011 Creative Commons Attribution-Noncommercial-Share Alike 3.0 http://creativecommons.org/licenses/by-nc-sa/3.0/ application/pdf Institute of Electrical and Electronics Engineers (IEEE) MIT web domain |
| spellingShingle | Wang, Wentao Popa, Laura Cornelia Marathe, Radhika A. Weinstein, Dana An unreleased mm-wave resonant body transistor |
| title | An unreleased mm-wave resonant body transistor |
| title_full | An unreleased mm-wave resonant body transistor |
| title_fullStr | An unreleased mm-wave resonant body transistor |
| title_full_unstemmed | An unreleased mm-wave resonant body transistor |
| title_short | An unreleased mm-wave resonant body transistor |
| title_sort | unreleased mm wave resonant body transistor |
| url | http://hdl.handle.net/1721.1/73576 |
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