Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer
The authors investigated a contrast enhancement behavior of hydrogen silsesquioxane (HSQ) in a salty development system (NaOH/NaCl). Time-resolved analysis of contrast curves and line-grating patterns were carried out to investigate the unique properties of a salty development process. In NaOH devel...
| Main Authors: | , , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
American Vacuum Society (AVS)
2012
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| Online Access: | http://hdl.handle.net/1721.1/74146 https://orcid.org/0000-0001-7453-9031 |
| _version_ | 1826207799479107584 |
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| author | Nam, Sung-Wook Rooks, Michael J. Yang, Joel K. W. Berggren, Karl K. Kim, Hyun-Mi Lee, Min-Hyun Kim, Ki-Bum Sim, Jae Hwan Yoon, Do Yeung |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Nam, Sung-Wook Rooks, Michael J. Yang, Joel K. W. Berggren, Karl K. Kim, Hyun-Mi Lee, Min-Hyun Kim, Ki-Bum Sim, Jae Hwan Yoon, Do Yeung |
| author_sort | Nam, Sung-Wook |
| collection | MIT |
| description | The authors investigated a contrast enhancement behavior of hydrogen silsesquioxane (HSQ) in a salty development system (NaOH/NaCl). Time-resolved analysis of contrast curves and line-grating patterns were carried out to investigate the unique properties of a salty development process. In NaOH developer without salt, the development process was saturated beyond a certain development time. On the other hand, the addition of salt enabled a continuous development, which was not observed in the pure NaOH development. The continuous thinning process enhances the contrast of HSQ in the salty developer, which allows a fast collapsing behavior in HSQ line-grating patterns. During development process, salt seems to have the role of modifying HSQ by breaking network bonds preferentially, leading to a continuous development rate. |
| first_indexed | 2024-09-23T13:55:09Z |
| format | Article |
| id | mit-1721.1/74146 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T13:55:09Z |
| publishDate | 2012 |
| publisher | American Vacuum Society (AVS) |
| record_format | dspace |
| spelling | mit-1721.1/741462022-09-28T17:02:56Z Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer Nam, Sung-Wook Rooks, Michael J. Yang, Joel K. W. Berggren, Karl K. Kim, Hyun-Mi Lee, Min-Hyun Kim, Ki-Bum Sim, Jae Hwan Yoon, Do Yeung Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Yang, Joel K. W. Berggren, Karl K. The authors investigated a contrast enhancement behavior of hydrogen silsesquioxane (HSQ) in a salty development system (NaOH/NaCl). Time-resolved analysis of contrast curves and line-grating patterns were carried out to investigate the unique properties of a salty development process. In NaOH developer without salt, the development process was saturated beyond a certain development time. On the other hand, the addition of salt enabled a continuous development, which was not observed in the pure NaOH development. The continuous thinning process enhances the contrast of HSQ in the salty developer, which allows a fast collapsing behavior in HSQ line-grating patterns. During development process, salt seems to have the role of modifying HSQ by breaking network bonds preferentially, leading to a continuous development rate. 2012-10-19T14:13:58Z 2012-10-19T14:13:58Z 2009-12 Article http://purl.org/eprint/type/JournalArticle 1071-1023 1520-8567 http://hdl.handle.net/1721.1/74146 Nam, Sung-Wook et al. “Contrast Enhancement Behavior of Hydrogen Silsesquioxane in a Salty Developer.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 27.6 (2009): 2635. © 2009 American Vacuum Society https://orcid.org/0000-0001-7453-9031 en_US http://dx.doi.org/10.1116/1.3245991 Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf American Vacuum Society (AVS) MIT web domain |
| spellingShingle | Nam, Sung-Wook Rooks, Michael J. Yang, Joel K. W. Berggren, Karl K. Kim, Hyun-Mi Lee, Min-Hyun Kim, Ki-Bum Sim, Jae Hwan Yoon, Do Yeung Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer |
| title | Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer |
| title_full | Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer |
| title_fullStr | Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer |
| title_full_unstemmed | Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer |
| title_short | Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer |
| title_sort | contrast enhancement behavior of hydrogen silsesquioxane in a salty developer |
| url | http://hdl.handle.net/1721.1/74146 https://orcid.org/0000-0001-7453-9031 |
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