Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

The authors investigated a contrast enhancement behavior of hydrogen silsesquioxane (HSQ) in a salty development system (NaOH/NaCl). Time-resolved analysis of contrast curves and line-grating patterns were carried out to investigate the unique properties of a salty development process. In NaOH devel...

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Bibliographic Details
Main Authors: Nam, Sung-Wook, Rooks, Michael J., Yang, Joel K. W., Berggren, Karl K., Kim, Hyun-Mi, Lee, Min-Hyun, Kim, Ki-Bum, Sim, Jae Hwan, Yoon, Do Yeung
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: American Vacuum Society (AVS) 2012
Online Access:http://hdl.handle.net/1721.1/74146
https://orcid.org/0000-0001-7453-9031

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