Micro-layered-photolithography for Micro-Fabrication and Micro-Molding
A novel process based on the principle of layered photolithography has been proposed and tested for making real three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelengt...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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2004
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| Online Access: | http://hdl.handle.net/1721.1/7453 |
| _version_ | 1826190999589748736 |
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| author | Tang, Y. Loh, Han Tong Fuh, J.-Y.-H. Lu, L. Wong, Yeow Sheong Thian, S. C. H. |
| author_facet | Tang, Y. Loh, Han Tong Fuh, J.-Y.-H. Lu, L. Wong, Yeow Sheong Thian, S. C. H. |
| author_sort | Tang, Y. |
| collection | MIT |
| description | A novel process based on the principle of layered photolithography has been proposed and tested for making real three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dimensional (2D) patterns sliced from a three dimensional (3D) micro-part was employed for the photolithography process. The experiments were conducted on the solidification of liquid photopolymer from single layer to multiple layers. The single-layer photolithography experiments showed that certain photopolymers could be applied for the 3D micro-fabrication, and solid layers with sharp shapes could be formed from the liquid polymer identified. By using a unique alignment technique, multiple layers of photolithography was successfully realized for a micro-gear with features at 60 microns. Electroforming was also conducted for converting the photopolymer master to a metal cavity of the micro-gear, which proved that the process is feasible for micro-molding. |
| first_indexed | 2024-09-23T08:48:33Z |
| format | Article |
| id | mit-1721.1/7453 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T08:48:33Z |
| publishDate | 2004 |
| record_format | dspace |
| spelling | mit-1721.1/74532019-04-10T19:10:27Z Micro-layered-photolithography for Micro-Fabrication and Micro-Molding Tang, Y. Loh, Han Tong Fuh, J.-Y.-H. Lu, L. Wong, Yeow Sheong Thian, S. C. H. Electroforming Micro-fabrication Micro-molding Photolithography A novel process based on the principle of layered photolithography has been proposed and tested for making real three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dimensional (2D) patterns sliced from a three dimensional (3D) micro-part was employed for the photolithography process. The experiments were conducted on the solidification of liquid photopolymer from single layer to multiple layers. The single-layer photolithography experiments showed that certain photopolymers could be applied for the 3D micro-fabrication, and solid layers with sharp shapes could be formed from the liquid polymer identified. By using a unique alignment technique, multiple layers of photolithography was successfully realized for a micro-gear with features at 60 microns. Electroforming was also conducted for converting the photopolymer master to a metal cavity of the micro-gear, which proved that the process is feasible for micro-molding. Singapore-MIT Alliance (SMA) 2004-12-14T19:55:08Z 2004-12-14T19:55:08Z 2005-01 Article http://hdl.handle.net/1721.1/7453 en Innovation in Manufacturing Systems and Technology (IMST); 223014 bytes application/pdf application/pdf |
| spellingShingle | Electroforming Micro-fabrication Micro-molding Photolithography Tang, Y. Loh, Han Tong Fuh, J.-Y.-H. Lu, L. Wong, Yeow Sheong Thian, S. C. H. Micro-layered-photolithography for Micro-Fabrication and Micro-Molding |
| title | Micro-layered-photolithography for Micro-Fabrication and Micro-Molding |
| title_full | Micro-layered-photolithography for Micro-Fabrication and Micro-Molding |
| title_fullStr | Micro-layered-photolithography for Micro-Fabrication and Micro-Molding |
| title_full_unstemmed | Micro-layered-photolithography for Micro-Fabrication and Micro-Molding |
| title_short | Micro-layered-photolithography for Micro-Fabrication and Micro-Molding |
| title_sort | micro layered photolithography for micro fabrication and micro molding |
| topic | Electroforming Micro-fabrication Micro-molding Photolithography |
| url | http://hdl.handle.net/1721.1/7453 |
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