Design and modeling of a PZT thin film based piezoelectric micromachined ultrasonic transducer (PMUT)
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.
| 主要作者: | |
|---|---|
| 其他作者: | |
| 格式: | Thesis |
| 语言: | eng |
| 出版: |
Massachusetts Institute of Technology
2012
|
| 主题: | |
| 在线阅读: | http://hdl.handle.net/1721.1/74942 |
| 总结: | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012. |
|---|