Design and modeling of a PZT thin film based piezoelectric micromachined ultrasonic transducer (PMUT)

Design and modeling of a PZT thin film based piezoelectric micromachined ultrasonic transducer (PMUT)

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.

Bibliographic Details
Main Author: Smyth, Katherine Marie
Other Authors: Sang-Gook Kim.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2012
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/74942

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