Design and modeling of a PZT thin film based piezoelectric micromachined ultrasonic transducer (PMUT)
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2012
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| Online Access: | http://hdl.handle.net/1721.1/74942 |