Piezoelectric MEMS for energy harvesting
Piezoelectric microelectromechanical systems (MEMS) have been proven to be an attractive technology for harvesting small magnitudes of energy from ambient vibrations. This technology promises to eliminate the need for replacing chemical batteries or complex wiring in microsensors/microsystems, movin...
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| Format: | Article |
| Language: | en_US |
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Cambridge University Press (Materials Research Society)
2012
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| Online Access: | http://hdl.handle.net/1721.1/75255 https://orcid.org/0000-0002-3125-3268 |
| _version_ | 1826204009153691648 |
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| author | Kim, Sang-Gook Priya, Shashank Kanno, Isaku |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Kim, Sang-Gook Priya, Shashank Kanno, Isaku |
| author_sort | Kim, Sang-Gook |
| collection | MIT |
| description | Piezoelectric microelectromechanical systems (MEMS) have been proven to be an attractive technology for harvesting small magnitudes of energy from ambient vibrations. This technology promises to eliminate the need for replacing chemical batteries or complex wiring in microsensors/microsystems, moving us closer toward battery-less autonomous sensors systems and networks. To achieve this goal, a fully assembled energy harvester the size of a US quarter dollar coin (diameter = 24.26 mm, thickness = 1.75 mm) should be able to robustly generate about 100 μW of continuous power from ambient vibrations. In addition, the cost of the device should be sufficiently low for mass scale deployment. At the present time, most of the devices reported in the literature do not meet these requirements. This article reviews the current state of the art with respect to the key challenges such as high power density and wide bandwidth of operation. This article also describes improvements in piezoelectric materials and resonator structure design, which are believed to be the solutions to these challenges. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed, and MEMS processes for these new classes of materials are being investigated. Nonlinear resonating beams for wide bandwidth resonance are also being developed to enable more robust operation of energy harvesters. |
| first_indexed | 2024-09-23T12:47:23Z |
| format | Article |
| id | mit-1721.1/75255 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T12:47:23Z |
| publishDate | 2012 |
| publisher | Cambridge University Press (Materials Research Society) |
| record_format | dspace |
| spelling | mit-1721.1/752552022-10-01T11:06:27Z Piezoelectric MEMS for energy harvesting Kim, Sang-Gook Priya, Shashank Kanno, Isaku Massachusetts Institute of Technology. Department of Mechanical Engineering Kim, Sang Gook Kim, Sang-Gook Piezoelectric microelectromechanical systems (MEMS) have been proven to be an attractive technology for harvesting small magnitudes of energy from ambient vibrations. This technology promises to eliminate the need for replacing chemical batteries or complex wiring in microsensors/microsystems, moving us closer toward battery-less autonomous sensors systems and networks. To achieve this goal, a fully assembled energy harvester the size of a US quarter dollar coin (diameter = 24.26 mm, thickness = 1.75 mm) should be able to robustly generate about 100 μW of continuous power from ambient vibrations. In addition, the cost of the device should be sufficiently low for mass scale deployment. At the present time, most of the devices reported in the literature do not meet these requirements. This article reviews the current state of the art with respect to the key challenges such as high power density and wide bandwidth of operation. This article also describes improvements in piezoelectric materials and resonator structure design, which are believed to be the solutions to these challenges. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed, and MEMS processes for these new classes of materials are being investigated. Nonlinear resonating beams for wide bandwidth resonance are also being developed to enable more robust operation of energy harvesters. United States. Dept. of Energy (Office of Basic Energy Sciences, #DE-FG02–07ER46480) United States. Dept. of Energy (Office of Basic Energy Sciences, DE-FG02–09ER46577) United States. Air Force Office of Scientific Research (AFOSR Young Investigator Program) United States. Defense Advanced Research Projects Agency (DARPA Grant HR0011–06–1-0045) MIT-Iberian Nanotechnology Laboratory (Program) 2012-12-05T20:36:32Z 2012-12-05T20:36:32Z 2012-11 Article http://purl.org/eprint/type/JournalArticle 0883-7694 1938-1425 http://hdl.handle.net/1721.1/75255 Kim, Sang-Gook, Shashank Priya, and Isaku Kanno. “Piezoelectric MEMS for Energy Harvesting.” MRS Bulletin 37.11 (2012): 1039–1050. Web.© Materials Research Society 2012. https://orcid.org/0000-0002-3125-3268 en_US http://dx.doi.org/10.1557/mrs.2012.275 MRS Bulletin Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Cambridge University Press (Materials Research Society) Kim |
| spellingShingle | Kim, Sang-Gook Priya, Shashank Kanno, Isaku Piezoelectric MEMS for energy harvesting |
| title | Piezoelectric MEMS for energy harvesting |
| title_full | Piezoelectric MEMS for energy harvesting |
| title_fullStr | Piezoelectric MEMS for energy harvesting |
| title_full_unstemmed | Piezoelectric MEMS for energy harvesting |
| title_short | Piezoelectric MEMS for energy harvesting |
| title_sort | piezoelectric mems for energy harvesting |
| url | http://hdl.handle.net/1721.1/75255 https://orcid.org/0000-0002-3125-3268 |
| work_keys_str_mv | AT kimsanggook piezoelectricmemsforenergyharvesting AT priyashashank piezoelectricmemsforenergyharvesting AT kannoisaku piezoelectricmemsforenergyharvesting |