Design, fabrication and implementation of a flexure-based micropositioner for Dip Pen Nanolithography

Design, fabrication and implementation of a flexure-based micropositioner for Dip Pen Nanolithography

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.

Bibliographic Details
Main Author: Thomas, Marcel A. C. (Marcel Adam Craig)
Other Authors: Martin L. Culpepper.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2012
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/75683

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